物理化学学报 >> 1995, Vol. 11 >> Issue (09): 791-795.doi: 10.3866/PKU.WHXB19950906

研究论文 上一篇    下一篇

射频溅射制备的多晶ZnO膜表面氧的吸附和脱附

张德恒   

  1. 山东大学物理系，济南 250100
  • 收稿日期:1994-09-03 修回日期:1994-12-29 发布日期:1995-09-15
  • 通讯作者: 张德恒

Adsorption and Desorption of Oxygen on the Surface of Polycrystalline ZnO Films Deposited by r.f.Sputtering

Zhang Da-Heng   

  1. Department of Physics,Shandong University,Jinan 250100
  • Received:1994-09-03 Revised:1994-12-29 Published:1995-09-15
  • Contact: Zhang Da-Heng

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摘要：

多晶的六角密排的c轴平行于衬底的ZnO膜已用射频溅射的方法制备出来，一电场感应的氧吸附在这些膜上被观察到．由紫外光照射或与Ar离子反应所产生的氧的脱附可使膜的电导率增加6－7个数量级，并且一个积累层在膜的表面显现出来．

关键词: ZnO, 吸附, 脱附, 光脱附, 光响应

Abstract:

Hexagonal ZnO films with the preferred growth orientation of c axis parallel to the substrate have been deposited by r.f. sputtering. An electrical field induced oxygen adsorption was observed on these films. Oxygen adsorption produced by illumination of a UV light or/and reaction with Ar plasma increased the conductivity of the films by 6-7 orders of magnitude and an accumulation layer displayed on the surface of the films.

Key words: ZnO, Adsorption, Desorption, Photodesorption, Photoresponse