物理化学学报 >> 2004, Vol. 20 >> Issue (02): 113-117.doi: 10.3866/PKU.WHXB20040201

研究论文    下一篇

化学镀铜过程混合电位本质的研究

谷新;胡光辉;王周成;林昌健   

  1. 厦门大学固体表面物理化学国家重点实验室,化学系;厦门大学材料科学与工程系,厦门 361005
  • 收稿日期:2003-07-10 修回日期:2003-08-29 发布日期:2004-02-15
  • 通讯作者: 林昌健 E-mail:cjlin@xmu.edu.cn

In situ Investigation on the Behavior of Mixed Potential in Electroless Copper Plating

Gu Xin;Hu Guang-Hui;Wang Zhou-Cheng;Lin Chang-Jian   

  1. State Key Laboratory for Physical Chemistry of Solid Surface, Department of Chemistry; Department of Materials Science and Engineering, Xiamen University, Xiamen 361005
  • Received:2003-07-10 Revised:2003-08-29 Published:2004-02-15
  • Contact: Lin Chang-Jian E-mail:cjlin@xmu.edu.cn

摘要: 现场测量了铜基和陶瓷基化学镀铜过程混合电位-时间曲线(Emix-t),成功地检测到了化学镀诱发过程.考察了添加剂和络合剂的浓度以及pH值对Emix-t曲线的影响,结合阴、阳极极化曲线及双电层理论对各种影响因素进行了讨论.新生铜活化的铜基化学镀铜的诱发过程是一个缓慢激活过程,所对应的Emix-t曲线是一个稍微倾斜的台阶,这不同于钯活化的基体的诱发过程.通过对不同活化工艺的Emix-t曲线的比较,发现较高的活化温度能明显减少活化时间,而且还可加速诱发过程,从而提高化学沉积铜的速度.

关键词: 化学镀铜, 铜基体, 陶瓷基体, 新生铜, 混合电位, 诱发时间, 活化工艺

Abstract: The mixed potential as a function of time was measured during the electroless copper plating on ceramic and copper substrates, and the induction process was determined successfully. The effects of the chelating agents, additives and pH value on the mixed potential-time curves were investigated. The results indicate that the mixed potential-time curves shift in negative direction and the induction time becomes longer with increasing concentration of the chelating agents or the additives in the solution. And higher pH values in the solution can shorten the induction time and make the potential-time curves more negative. The activation process can affect the induction time, higher activation temperature decreases the induction time greatly and increases the plating rate at the same time. It needs much longer induction time for plating copper on fresh-copper-activated copper substrate than that on the Pd-activated copper substrate. On the basis of these results, we furthermore explained the reason why non-noble-metal activation process is inferior to noble-metal activation process in electroless copper plaing.

Key words: Electroless copper plating, Copper substrate, Ceramic substrate, Fresh copper, Mixed potential, Induction time, Activation process