物理化学学报 >> 2007, Vol. 23 >> Issue (04): 565-568.doi: 10.3866/PKU.WHXB20070422

研究论文 上一篇    下一篇

定位生长法制备AFM单壁碳纳米管针尖

王锐; 徐化明; 李聃; 梁吉   

  1. 清华大学机械工程系, 清华大学先进成型制造重点实验室, 北京 100084; 中国科学院上海微系统与信息技术研究所, 上海 200050
  • 收稿日期:2006-08-14 修回日期:2006-11-13 发布日期:2007-04-05
  • 通讯作者: 梁吉 E-mail:liangji@tsinghua.edu.cn

Growth of Single-walled Carbon Nanotubes on the Given Locations for AFM Tips

WANG Rui; XU Hua-Ming; LI Dan; LIANG Ji   

  1. Key Laboratory for Advanced Manufacturing by Materials Processing Technology, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, P. R. China; Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, P. R. China
  • Received:2006-08-14 Revised:2006-11-13 Published:2007-04-05
  • Contact: LIANG Ji E-mail:liangji@tsinghua.edu.cn

摘要: 采用粘性胶状物作为生长单壁碳纳米管(SWNTs)的催化剂前驱体, 在原子力显微镜下驱动废旧的硅探针粘附该种胶状物,随后进行化学气相沉积(CVD), 实现了SWNTs在硅探针末端的定位生长, 成功地制备出了SWNT针尖. 对SWNTs及SWNT 针尖进行了表征, 并对针尖的稳定成像条件进行了分析. 结果表明, 针尖一般由5-10 nm 的SWNT 管束构成, 伸出长度仅为几百纳米, 受热振动影响较小, 无需后处理即可稳定地成像, 成像分辨率与新的硅探针相当.

关键词: 单壁碳纳米管, 原子力显微镜, 化学气相沉积, 探针

Abstract: An adhesive semisolid mixture was used as catalyst precursors for the synthesis of single-walled carbon nanotubes (SWNTs). With atomic forcemicroscopy (AFM),worn-out silicon probeswere driven to approach the glue-like catalyst precursors, followed by chemical vapor deposition (CVD). Thus SWNTs were successfully located on the end of silicon probes as AFM tips. The as-prepared SWNTs and tips were characterized, and the effect of SWNT morphology on imaging stabilization was discussed. The results showed that most of tips were SWNT bundles, which were 5-10 nm in diameter, several hundred nanometers in length and independent of severe thermal vibration. When SWNTs were parallel to the axis of silicon pyramids, the tips could obtain high-resolution images without additional treatments.

Key words: SWNTs, AFM, CVD, Probe

MSC2000: 

  • O648