物理化学学报 >> 2009, Vol. 25 >> Issue (05): 835-839.doi: 10.3866/PKU.WHXB20090504

研究论文 上一篇    下一篇

ITO在NaOH溶液中阳极与阴极极化过程的电化学行为

王浩 钟澄 蒋程捷 顾雄 李劲 蒋益明   

  1. 复旦大学材料科学系, 上海 200433
  • 收稿日期:2008-12-01 修回日期:2009-01-15 发布日期:2009-05-04
  • 通讯作者: 蒋益明 E-mail:ymjiang@fudan.edu.cn

Electrochemical Behavior of ITO Films during Anodic and Cathodic Polarization in Sodium Hydroxide Solutions

WANG Hao, ZHONG Cheng, JIANG Cheng-Jie, GU Xiong, LI Jin, JIANG Yi-Ming   

  1. Department of Material Science, Fudan University, Shanghai 200433, P. R. China
  • Received:2008-12-01 Revised:2009-01-15 Published:2009-05-04
  • Contact: JIANG Yi-Ming E-mail:ymjiang@fudan.edu.cn

摘要:

通过循环伏安法等方法研究了氧化铟锡(ITO)透明导电薄膜的电化学行为. 获得了ITO薄膜在NaOH溶液中阴极和阳极极化处理前后的循环伏安曲线. 采用透射光谱, 方块电阻测试, 扫描电子显微镜(SEM), 能量色散X射线荧光光谱(EDS)与X射线衍射(XRD)表征ITO薄膜经电化学处理后的反应产物. 结果表明, ITO薄膜在阳极处理后(约为+1.5 V(vs SCE))保持了稳定的成分和结构. 但经阴极处理后(约为-1.5 V(vs SCE))发生了严重的电化学腐蚀, 可见光透射率大幅下降, 方块电阻增加一个数量级. 经SEM、EDS和XRD表征分析, 证明阴极处理过程使ITO薄膜中的In3+还原成了In单质.

关键词: ITO薄膜, 循环伏安, 阴极极化, 电化学腐蚀

Abstract:

The electrochemical corrosion behaviors of indiumtin oxide (ITO) films were investigated by electrochemical methods in sodium hydroxide solutions. A cyclic voltammetric study of ITO films using both anodic and cathodic polarization was undertaken. Transmittance spectra, sheet resistance, scanning electron microscopy (SEM), energy dispersive X-ray fluorescence spectrometry (EDS) and X-ray diffraction (XRD) analysis were used to characterize the severity of corrosion, the corrosion morphology and to identify the corrosion product. The ITO films remained stable after anodic polarization (approximately 1.5 V vs saturated calomel electrode (SCE)). In contrast, serious corrosion occurred during cathodic polarization (approximately -1.5 V (vs SCE)). Optical transmittance decreased greatly and sheet resistance increased by an order of magnitude. Some In3+ ions in the ITO electrode are reduced to metallic In attached to the surface.

Key words: ITO Film, Cyclic voltammetry, Cathodic polarization, Electrochemical corrosion

MSC2000: 

  • O646