物理化学学报 >> 2010, Vol. 26 >> Issue (09): 2392-2396.doi: 10.3866/PKU.WHXB20100846

电化学 上一篇    下一篇

原位椭圆偏振光谱研究多孔阳极氧化铝初期生长过程

雷惊雷, 张李娜, 李凌杰, 郑莎, 王超, 谢昭明, 张胜涛   

  1. 重庆大学化学化工学院, 重庆 400044
  • 收稿日期:2010-02-19 修回日期:2010-04-18 发布日期:2010-09-02
  • 通讯作者: 李凌杰 E-mail:LJLi@cqu.edu.cn
  • 基金资助:

    国家自然科学基金(20603049, 20803097)和教育部留学回国人员科研启动基金(教外司留[2007]1108-4),重庆市自然科学基金 (CSTS2008BB4174)资助项目

In situ Ellipsometric Study on the Initial Stages of Porous Anodization of Aluminum

LEI Jing-Lei, ZHANG Li-Na, LI Ling-Jie, ZHENG Sha, WANG Chao, XIE Zhao-Ming, ZHANG Sheng-Tao   

  1. College of Chemistry and Chemical Engineering, Chongqing University, Chongqing 400044, P. R. China
  • Received:2010-02-19 Revised:2010-04-18 Published:2010-09-02
  • Contact: LI Ling-Jie E-mail:LJLi@cqu.edu.cn
  • Supported by:

    The project was supported by the National Natural Science Foundation of China (20603049, 20803097), Scientific Research Foundation for the Returned Overseas Chinese Scholars, Ministry of Education, China ([2007]1108-4) and Natural Science Foundation Project of CQCSTC (2008BB4174).

摘要:

根据铝阳极氧化初期不同阶段Al-H2SO4体系的界面特征建立多个光学模型, 并采用有效介质近似解析了高时间分辨率的原位椭圆偏振光谱数据, 详细获得铝阳极氧化初期的Al2O3-Al 界面层、Al2O3阻挡层以及多孔层组成、厚度变化的动态信息. 根据光学模型及计算结果, 可以清楚地分辨铝阳极氧化过程中的阻挡层形成、孔洞萌生、孔洞发展以及多孔层稳定生长等4个阶段. 在多孔层稳定生长阶段, 阻挡层厚度及多孔层孔隙率几乎不变,而多孔层厚度随时间线性增长, 其速率为5.8 nm·s-1.

关键词: 铝, 阳极氧化, 模板, 椭圆偏振光谱, 有效介质近似

Abstract:

The initial stages of the anodization of aluminum are influential during the preparation of anodic aluminum oxide nanotemplates and provide an insight into their formation mechanism. The formation and development of both the barrier layer and the porous layer are involved. In this paper, in situ ellipsometric spectra with a high time-resolution were collected. To deconvolute the ellipsometric spectra, several optical models were extracted from the physical models of the Al-H2SO4 interface. Using these models and the effective medium approximation, detailed information about the composition and thickness of the Al2O3-Al interphase, Al2O3 barrier layer, and porous layer was acquired. Based on the deconvoluted results and the optical models, 4 stages of the porous anodization of aluminum, i.e., the barrier layer grows, pores form, pores enlarge, and pores grow at a stable rate, were clearly distinguished. Moreover, during the last stage the thickness of the porous layer changes linearly with time at a rate of 5.8 nm·s-1 while both the thickness of the barrier layer and the porosity of the porous layer change very little.

Key words: Aluminum, Anodization, Template, Spectroscopic ellipsometry, Effective medium approximation

MSC2000: 

  • O646.54