物理化学学报 >> 2012, Vol. 28 >> Issue (02): 489-493.doi: 10.3866/PKU.WHXB201111212

材料物理化学 上一篇    下一篇

介孔硅与大孔硅的结构、电学和气敏特性

孙鹏, 胡明, 李明达, 马双云   

  1. 天津大学电子信息工程学院, 天津 300072
  • 收稿日期:2011-10-13 修回日期:2011-11-16 发布日期:2012-01-11
  • 通讯作者: 孙鹏 E-mail:sunpengtju@163.com
  • 基金资助:

    国家自然科学基金(60771019)和天津市应用基础及前沿技术研究计划(11JCZDJC15300)资助项目

Microstructure, Electrical and Gas Sensing Properties of Meso-Porous Silicon and Macro-Porous Silicon

SUN Peng, HU Ming, LI Ming-Da, MA Shuang-Yun   

  1. School of Electronic and Information Engineering, Tianjin University, Tianjin 300072, P. R. China
  • Received:2011-10-13 Revised:2011-11-16 Published:2012-01-11
  • Contact: SUN Peng E-mail:sunpengtju@163.com
  • Supported by:

    The project was supported by the National Natural Science Foundation of China (60771019) and Tianjin Key Research Program of Application Foundation and Advanced Technology, China (11JCZDJC15300).

摘要: 采用双槽电化学腐蚀法在P型单晶硅表面制备两种多孔硅. 根据它们的孔径将它们分为介孔硅和大孔硅. 使用扫描电子显微镜(SEM)观察两种多孔硅表面和断面形貌, 介孔硅和大孔硅的表面化学键用傅里叶变换红外(FTIR)光谱仪来研究, 通过I-V特性测试表征两种多孔硅电学特性, 随后在室温下测试其气敏特性. 结果表明: 介孔硅具有较高的气体灵敏度, 大孔硅具有较好的气体响应恢复特性. 介孔硅对NO2气体具有较好的选择性, 大孔硅对NH3气体具有较好的选择性.

关键词: 介孔硅, 大孔硅, 室温, 气敏特性

Abstract: Two different kinds of porous silicon (PS) were grown by electrochemical corrosion in a double-tank cell on the surface of single-crystalline P-type silicon. According to their pore sizes, they were denoted as meso-porous silicon (meso-PS) and macro-porous silicon (macro-PS). The surface and cross-section morphologies of the PS were observed by scanning electron microscope (SEM). The surface chemical bonds of the meso-PS and macro-PS were investigated by Fourier transform infrared (FTIR) spectroscopy. The electrical properties of the PS were studied by measuring the I-V characteristics. The gas sensing properties of meso-PS and macro-PS were thoroughly measured at room temperature. Meso-PS has much higher sensitivity, while macro-PS has better response-recovery characteristics. Meso-PS shows better selectivity for NO2, while macro-PS shows better selectivity for NH3.

Key words: Meso-porous silicon, Macro-porous silicon, Room temperature, Gas sensing property

MSC2000: 

  • O647