物理化学学报 >> 2012, Vol. 28 >> Issue (06): 1533-1538.doi: 10.3866/PKU.WHXB201203191

材料物理化学 上一篇    下一篇

TixV1-xO2薄膜的光学及相变特性

胡文亮1,2,3, 徐刚1,2, 马健伟1,2,4, 熊斌1,2,3, 史继富1,2   

  1. 1. 中国科学院广州能源研究所, 广州 510640;
    2. 中国科学院可再生能源与天然气水合物重点实验室, 广州 510640;
    3. 中国科学院研究生院, 北京 100049;
    4. 东北石油大学土木建筑工程学院, 黑龙江大庆 163318
  • 收稿日期:2011-12-13 修回日期:2012-03-16 发布日期:2012-05-17
  • 通讯作者: 徐刚 E-mail:xugang@ms.giec.ac.cn
  • 基金资助:

    国家自然科学基金(51102235), 广东省产学研结合计划(2010B090400109)和广东省中国科学院全面战略合作计划(2011B090300044)资助项目

Optical and Phase Transition Properties of TixV1-xO2 Thin Films

HU Wen-Liang1,2,3, XU Gang1,2, MA Jian-Wei1,2,4, XIONG Bin1,2,3, SHI Ji-Fu1,2   

  1. 1. Guangzhou Institute of Energy Conversion, Chinese Academy of Sciences, Guangzhou 510640, P. R. China;
    2. Key Laboratory of Renewable Energy and Gas Hydrate, Chinese Academy of Sciences, Guangzhou 510640, P. R. China;
    3. Graduate University of Chinese Academy of Sciences, Beijing 100049, P. R. China;
    4. Civil Engineering Institute, Northeast Petroleum University, Daqing 163318, Heilongjiang Province, P. R. China
  • Received:2011-12-13 Revised:2012-03-16 Published:2012-05-17
  • Contact: XU Gang E-mail:xugang@ms.giec.ac.cn
  • Supported by:

    The project was supported by the National Natural Science Foundation of China (51102235), Guangdong Industry-University-Research Collaboration, China (2010B090400109), and Strategic Collaboration of Guangdong and Chinese Academy of Sciences (2011B090300044).

摘要: 采用射频磁控溅射方法, 在c-Al2O3 (0001)基底上制备了不同钒钛比例的TixV1-xO2 (0≤x≤1)薄膜, 利用X射线衍射(XRD)、拉曼(Raman)光谱、紫外-可见-近红外(UV-Vis-NIR)光谱对薄膜结构及光学性能进行测试分析, 计算薄膜的太阳能智能调节率和光学带隙. 实验结果及分析表明: 随着Ti 含量的增加, 薄膜的红外调节特性和热滞特性逐渐减弱直至消失; 薄膜样品的光学带隙随着Ti 含量的增加而变宽, 光响应范围发生蓝移; 其光学带隙随着V含量的增加而变窄, 光响应范围发生红移.

关键词: 二氧化钒薄膜, 二氧化钛薄膜, 磁控溅射, 光学性能, 相变特性

Abstract: TixV1-xO2 (0≤x≤1) thin films with different molar ratios of V/Ti were prepared on c-plane sapphire (0001) substrates by radio frequency magnetron sputtering. The microstructure and optical properties of the thin films were determined by X-ray diffraction (XRD), Raman spectroscopy, and UV-visible-near infrared (UV-Vis-NIR) spectroscopy. The width of the optical band gap was calculated and the integrated solar transmittance of the films was characterized. As the content of titanium was increased, infrared regulation and thermal hysteresis were gradually reduced until they disappeared. The results show that the band gap of the thin films broadens as the content of titanium increases, causing the optical absorption edge to exhibit a blue shift. Conversely, the band gap narrows as the proportion of vanadium is increased, which causes a red shift of the optical absorption edge.

Key words: VO2 thin film, TiO2 thin film, Magnetron sputtering, Optical property, Phase transition property

MSC2000: 

  • O644