物理化学学报 >> 1998, Vol. 14 >> Issue (09): 799-803.doi: 10.3866/PKU.WHXB19980907

研究论文 上一篇    下一篇

金刚石晶形显露的化学控制

陈友存, 谢仿晴, 张青哲, 林章达   

  1. 中国科学院物理研究所,表面物理国家重点实验室,北京 100080
  • 收稿日期:1998-01-14 修回日期:1998-03-09 发布日期:1998-09-15
  • 通讯作者: 谢仿晴

Chemcal Control of Facet Appearance of Diamond

Chen You-Cun, Xie Fang-Qing, Zhang Qing-Zhe, Lin Zhang-Da   

  1. The State Key Labaratory of Surface Physics,Insitute of Physics,Chinese Academy of Sciences,Beijing 100080
  • Received:1998-01-14 Revised:1998-03-09 Published:1998-09-15
  • Contact: Xie Fang-Qing

摘要:

采用热丝化学气相沉积法(HFCVD),研究了N2、O2对金刚石晶形显露的影响. 发现微量的氮气的加入([N2]/[CH4]<1%)有利于金刚石(100)晶面的显露,且不会降低金刚石晶形的完整性;微量氧的加入有利于金刚石(111)面显露.采用氧辅助控制金刚石膜(111)织构生长,可以使X射线(111)峰摇摆曲线的半宽降到6.2°.氮或氧的加入扩大了织构生长金刚石(100)或(111)膜的基片温度范围.

关键词: 金刚石, 织构生长, 化学气相沉积, 晶形显露

Abstract:

 The influence of N2 and O2 on the facet appearance of diamond has been studied with hot filament chemical vapor deposition (HFCVD). It was f0und that adding minor amount of N2(V(N2)/V(CH4)<1%) and O2 (V(O2)/V(CH4)20%) to the source gas is favorable for the facet appearance of diamond (100) and (111) respectively. By the chemical control of textured growth of diamond (111) with adding O2, the FWHM of the rocking curve of X-ray (111) peak can be reduced to 6.2° The temperature window of substrate for the textured growth of diamond(100) or (111) was enlarged with the addition of N2 or O2.

Key words: Diamond, Textured growth, Chemical vapor deposition, Facet appearance