物理化学学报 >> 2011, Vol. 27 >> Issue (11): 26132613-2617..doi: 10.3866/PKU.WHXB20111117

电化学和新能源 上一篇    下一篇

ITO基底上ZnO薄膜的制备以及刻蚀图形的扫描电化学显微镜表征

汤儆1, 郑晶晶1, 徐炜1, 田晓春1, 林建航2   

  1. 1. 福州大学化学化工学院, 食品安全分析与检测教育部暨福建省重点实验室, 福州 350108;
    2. 福州大学分析测试中心, 福州 350002
  • 收稿日期:2011-04-18 修回日期:2011-08-01 发布日期:2011-10-27
  • 通讯作者: 汤儆 E-mail:jingtang@fzu.edu.cn
  • 基金资助:

    国家自然科学基金(20873112, 21073038)资助项目

Synthesis of ZnO on ITO and Etched Pattern Characterization by Scanning Electrochemical Microscopy

TANG Jing1, ZHENG Jing-Jing1, XU Wei1, TIAN Xiao-Chun1, LIN Jian-Hang2   

  1. 1. Key Laboratory of Analysis and Detection Technology for Food Safety, Ministry of Education & Fujian Province, College of Chemistry and Chemical Engineering, Fuzhou University, Fuzhou 350108, P. R. China;
    2. Instrumental Measurement and Analysis Center, Fuzhou University, Fuzhou, 350002, P. R. China
  • Received:2011-04-18 Revised:2011-08-01 Published:2011-10-27
  • Contact: TANG Jing E-mail:jingtang@fzu.edu.cn
  • Supported by:

    The project was supported by the National Natural Science Foundation of China (20873112, 21073038).

摘要: 在氧化铟锡(ITO)导电玻璃的衬底上, 利用直接电沉积方法制备了ZnO纳米线或ZnO薄膜. 然后利用存储有HCl刻蚀剂的琼脂糖微图案印章对其进行了化学刻蚀以形成不同的图形. 利用扫描电子显微镜(SEM)、X射线衍射(XRD)和扫描电化学显微镜(SECM)分别对ITO衬底上的ZnO薄膜的结构、形貌和电化学性质进行表征.

关键词: ZnO纳米线阵列, 电沉积, 琼脂糖印章, 扫描电化学显微镜

Abstract: We report a direct electrochemical deposition process to produce ZnO nanorods or a ZnO thin film on an indium tin oxide (ITO) substrate. The ZnO film was etched by an agarose stamp containing HCl as the etchant to form different patterns. The structure, morphology, and electrochemical properties of the ZnO thin films on the ITO substrate were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD), and scanning electrochemical microscopy (SECM).

Key words: ZnO nanorods array, Electrodeposition, Agarose stamp, Scanning electrochemical microscopy

MSC2000: 

  • O646