物理化学学报 >> 2011, Vol. 27 >> Issue (12): 2821-2825.doi: 10.3866/PKU.WHXB20112821

电化学和新能源 上一篇    下一篇

超声搅拌化学浴沉积法制备大颗粒和致密的CdS薄膜

史成武1,2, 陈柱1,2, 史高杨1,2, 孙人杰1   

  1. 1. 合肥工业大学化学工程学院, 合肥 230009;
    2. 中国科学院新型薄膜太阳电池重点实验室, 合肥 230031
  • 收稿日期:2011-07-14 修回日期:2011-09-21 发布日期:2011-11-25
  • 通讯作者: 史成武 E-mail:shicw506@gmail.com
  • 基金资助:

    国家自然科学基金(51072043), 973 计划重大科学问题导向项目(2011CBA00700), 安徽省年度重点科研计划项目(2010AKND0794), 安徽省高校自然科学基金(KJ2010A266)及合肥工业大学学生创新基金(cxsy102084)资助项目

Preparation of Large Grain and Dense CdS Thin Films Using Ultrasonic Agitation Chemical Bath Deposition

SHI Cheng-Wu1,2, CHEN Zhu1,2, SHI Gao-Yang1,2, SUN Ren-Jie1   

  1. 1. School of Chemical Engineering, Hefei University of Technology, Hefei 230009, P. R. China;
    2. Key Laboratory of Novel Thin FilmSolar Cells, Chinese Academy of Sciences, Hefei 230031, P. R. China
  • Received:2011-07-14 Revised:2011-09-21 Published:2011-11-25
  • Contact: SHI Cheng-Wu E-mail:shicw506@gmail.com
  • Supported by:

    The project was supported by the National Natural Science Foundation of China (51072043), National Key Basic Research Program of China (973) (2011CBA00700), Anhui Province Science and Technology Plan Project of China (2010AKND0794), College Natural Science Foundation of Anhui Province, China (KJ2010A266), and Undergraduate Innovation Fund of Hefei University of Technology, China (cxsy102084).

摘要: 采用超声搅拌化学浴法(UCBD)在SnO2:F 透明导电玻璃衬底上制备了CdS薄膜. 研究了退火和CdCl2处理对UCBD-CdS薄膜的表面形貌、晶体结构和直接带隙的影响, 比较了沉积时间对UCBD-CdS薄膜中CdS聚集体颗粒大小和堆积致密性的影响. 结果表明, CdCl2处理可使CdS聚集体中的小颗粒重新熔合在一起, 但CdS聚集体的大小并没有改变. 在UCBD-CdS薄膜的沉积过程中, CdS薄膜的横向和纵向生长速率之比会随着沉积时间的不同而改变, 且沉积时间是获得大颗粒的CdS聚集体和致密的UCBD-CdS薄膜的重要影响因素. 当沉积时间为40 min 时, 获得的UCBD-CdS薄膜较致密, CdS聚集体的大小为180 nm, 膜厚为80.8 nm,适合作为薄膜太阳电池的窗口层.

关键词: CdS薄膜, 超声搅拌, 化学浴沉积, 沉积时间, 退火, CdCl2处理

Abstract: We deposited CdS thin films onto F-doped SnO2 transparent conductive glass by ultrasonic agitation chemical bath deposition (UCBD). The influence of the annealing and CdCl2-treatment on the surface morphology, crystal structure, and direct band gap of the UCBD-CdS thin films was investigated. The effect of deposition time on the grain size of the CdS aggregates and the stack denseness of the UCBD-CdS thin films was compared. The results reveal that the small grains in the CdS aggregates were melted together and the CdS aggregate size did not change in the UCBD-CdS thin films after the CdCl2-treatment procedure. It is interesting that the ratio of the horizontal to vertical deposition rate varied with deposition time over the deposition period of the UCBD-CdS thin films. The deposition time was very important to obtain large CdS aggregate grains and dense UCBD-CdS thin films. Over a deposition time of 40 min the resulting UCBD-CdS thin films were dense and had a 180 nm grain size of CdS aggregates and a 80.8 nm of thin film thickness. The large-grained and dense UCBD-CdS thin films were suitable for thin film solar cells as a window layer.

Key words: CdS thin film, Ultrasonic agitation, Chemical bath deposition, Deposition time, Annealing, CdCl2-treatment

MSC2000: 

  • O646