物理化学学报 >> 2012, Vol. 28 >> Issue (04): 917-922.doi: 10.3866/PKU.WHXB201201172

软物质 上一篇    下一篇

硅表面复合自组装膜的制备及其摩擦性能

潘鹤, 滕淑华, 丁翠翠   

  1. 中国矿业大学材料科学与工程学院, 江苏徐州 221116
  • 收稿日期:2011-09-26 修回日期:2011-12-21 发布日期:2012-03-21
  • 通讯作者: 滕淑华 E-mail:shteng425@cumt.edu.cn
  • 基金资助:

    国家重点基础研究发展计划项目(973) (2007CB607605)和中央高校基本科研业务费专项资金(2011QNA06)资助

Preparation and Tribological Properties of Self-Assembled Composite Films on Silicon Surface

PAN He, TENG Shu-Hua, DING Cui-Cui   

  1. School of Materials Science and Engineering, China University of Mining and Technology, Xuzhou 221116, Jiangsu Province, P. R. China
  • Received:2011-09-26 Revised:2011-12-21 Published:2012-03-21
  • Contact: TENG Shu-Hua E-mail:shteng425@cumt.edu.cn
  • Supported by:

    The project was supported by the National Key Basic Research Program of China (973) (2007CB607605) and Fundamental Research Funds for the Central Universities, China (2011QNA06).

摘要: 采用自组装技术在单晶硅表面制备了3-氨基丙基三乙氧基硅烷(APTES)-SiO2-APTES复合膜, 并对其表面的组成、结构及摩擦性能进行了表征. 结果表明: 复合膜表面对水的接触角约为63°, 且表面平整、致密, 其平均粗糙度(Ra)约为0.963 nm. 通过原子力显微镜(AFM)和透射电子显微镜(TEM)观察到夹层中SiO2颗粒的粒径约为20-50 nm, 较均匀地分布在第一层APTES膜的表面. 与APTES自组装单层膜(SAMs)相比, APTESSiO2-APTES复合膜由于纳米SiO2颗粒的引入而表现出更低的摩擦系数和更长的耐磨寿命

关键词: 单晶硅, 自组装, 复合膜, 摩擦性能

Abstract: Composite films of 3-aminopropyltriethoxysilane (APTES)-SiO2-APTES were prepared on single-crystal silicon substrates using a self-assembly technique, and then their composition, structure, and tribological properties were characterized. The results showed that the composite films had a uniform and dense surface with an average roughness (Ra) of 0.963 nm and a contact angle of 63°. The atomic force microscopy (AFM) and transmission electron microscopy (TEM) observations revealed that, in the middle layer of the composite film, silica particles of 20-50 nm in diameter were uniformly deposited on the APTES layer. Compared to the APTES self-assembled monolayers (SAMs), the APTES-SiO2-APTES composite films exhibited a smaller friction coefficient and a longer wear life due to the introduction of the silica nano-particles.

Key words: Single-crystal silicon, Self-assembly, Composite film, Tribological property

MSC2000: 

  • O647