关键词: 射频磁控溅射, 室温, FTO 导电玻璃, TiO2纳米管阵列, NH4F/甘油

Abstract: Self-organized TiO2 nanotube arrays with micro-scale length were prepared on fluorine-doped tin oxide (FTO) conducting glass in NH4F/glycerol electrolyte by electrochemical anodization of pure titanium films deposited by radio frequency magnetron sputtering (RFMS) at roomtemperature. The samples were characterized by means of field emission scanning electron microscopy (FESEM), X-ray diffraction (XRD), and photoelectrochemistry methods. The results showed that Ti films prepared at the condition of Ar pressure 0.5 Pa, power 150 W, and 0.5 h at room temperature possessed the zone T model structure with good homogeneity and high denseness. When the anodization time was prolonged from 1 to 3 h at the voltage of 30 V, the pore diameter of TiO2 nanotubes increased from 50 to 75 nm, and the length increased from750 to 1100 nmand then gradually decreased to 800 nm, while their wall morphology changed from smooth to rough. Also with increasing the anodization voltage, the pore diameter became larger, and the remaining oxide layer reduced, which could be easily removed by ultrasonic-chemical cleaning in 0.05% (w, mass fraction) diluted HF solution. Moreover, the photocurrent response curves and electrochemical impedance spectroscopy (EIS) results indicated that UV-illumination clearly enhanced the effective separation of the electron-hole pairs and the crystallized electrodes from the annealing treatment of as-anodized electrodes at 450 ℃ exhibited a better photoelectrochemical performance.

Key words: Radio frequency magnetron sputtering, Roomtemperature, FTO conducting glass, TiO2 nanotube arrays, NH4F/glycerol