物理化学学报 >> 1992, Vol. 8 >> Issue (03): 383-388.doi: 10.3866/PKU.WHXB19920318

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制备类金刚石薄膜过程中的等离子体发射光谱

张慰萍; 陈竞; 方容川; 胡克良   

  1. 中国科学技术大学物理系，合肥 230026
  • 收稿日期:1991-02-10 修回日期:1991-10-06 发布日期:1992-06-15
  • 通讯作者: 张慰萍

Optical Emission Spectroscopy in Diamond-Like Carbon Film Deposition

Zhang Wei-Ping; Chen Jing; Fang Rong-Chun; Hu Ke-Liang   

  1. Department of Physics, University of science and Technology of China, Hefei 230026
  • Received:1991-02-10 Revised:1991-10-06 Published:1992-06-15
  • Contact: Zhang Wei-Ping

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摘要： 测定了不同反应条件下, 不同空间位置的等离子体发射光谱, 并与相应条件下生成的类金刚石薄膜的红外吸收谱进行对照, 分析了它们之间的关系。

关键词: 等离子体发射光谱, 辉光放电, 类金刚石薄膜

Abstract: We measured the optical emission spectra (OES) of glow discharged plasma of methane in the diamond-like carbon film deposition and analyzed the relationship between the OES and the deposition parameters, such as rf power, gas pressure and the distances from the lower electrode.
The infrared absorption of films were also measured and the results of infrared absorption were compared with that of OES measurement.

Key words: Optical emission spectroscopy, Glow discharge, Diamond-like carbon film