物理化学学报 >> 2001, Vol. 17 >> Issue (11): 961-965.doi: 10.3866/PKU.WHXB20011101

研究论文    下一篇

Al表面条纹状准有序纳米结构的AFM研究

郭等柱;侯士敏;申自勇;张耿民;赵兴钰;刘惟敏;吴锦雷;薛增泉   

  1. 北京大学电子学系,北京 100871
  • 收稿日期:2001-04-02 修回日期:2001-05-28 发布日期:2001-11-15
  • 通讯作者: 薛增泉 E-mail:zqx@pku.edu.cn

AFM Study of Quasiordered Stripelike Nanostructures on Surfaces of Aluminum

Guo Deng-Zhu;Hou Shi-Min;Shen Zi-Yong;Zhang Geng-Min;Zhao Xing-Yu;Liu Wei-Min;Wu Jin-Lei;Xue Zeng-Quan   

  1. Department of Electronics, Peking University, Beijing 100871
  • Received:2001-04-02 Revised:2001-05-28 Published:2001-11-15
  • Contact: Xue Zeng-Quan E-mail:zqx@pku.edu.cn

摘要: 用电化学抛光法在高纯铝表面生成纳米级条纹状的准有序结构.在原子力显微镜(AFM)下观察,条纹状结构的突起和凹槽部分线宽各为40~50 nm,峰谷高度差为1.5~5.0 nm.随工艺条件的变化该纳米结构的尺寸和有序程度有较大差异,只有在很窄的参数范围内才可以得到大面积有序的条纹状结构.在用阳极氧化法制备多孔膜过程中该结构不能保持.对这种有序结构的形成机理提出了定性解释.

关键词: 铝表面, 电化学抛光, 条纹结构, 准有序, 阳极氧化

Abstract: Quasiordered, stripelike, nanometerscale structures were spontaneously created on surfaces of highpurity(99.999%) aluminum by electropolishing. Observed under atomic force microscopy(AFM), the average width of single stripe and the distance between two neighboring stripes are about 40~50 nm,respectively, and the average height of the stripes is 1.5~5.0 nm. The highly ordered stripelike nanostructures can be obtained only within a narrow range of processing parameters. The stripe deficiencies, such as stripecross and stripeconvergence, within parallel stripes, can be seen on surface defects, which do not fundamentally affect the orientation of the stripes. The stripe structures are stable in atmosphere at room temperature. When samples with stripe structures were anodized to form porous alumina, the stripe structures vanished. A physical scenario was proposed to explain the growth mechanisms of the quasiordered stripelike structures.

Key words: Aluminum surfaces, Electropolishing, Stripe structures, Quasiordered,  Anodization