物理化学学报 >> 1998, Vol. 14 >> Issue (01): 57-62.doi: 10.3866/PKU.WHXB19980111

研究论文 上一篇    下一篇

自组装成膜技术制备TiO2薄膜的XPS研究

肖中党, 黄丹, 顾建华, 陆祖宏   

  1. 东南大学分子与生物分子电子学开放实验室，南京 210096|南通师范学院化学系，南通 226007
  • 收稿日期:1997-05-12 修回日期:1997-06-24 发布日期:1998-01-15
  • 通讯作者: 肖中党

X-ray Photoelectron Spectroscopy Study of the Deposition of TiO2 Thin Films on Self-assembly Monolayer

Xiao Zhong-Dang, Huang Dan, Gu Jian-Hua, Lu Zu-Hong   

  1. National Laboratory of Molecnlar and Biomolecular Electronics,Southeast University,Nanjing 210096|Chemistry Department of Nantong Teacher College,Nantong 226007
  • Received:1997-05-12 Revised:1997-06-24 Published:1998-01-15
  • Contact: Xiao Zhong-Dang

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摘要：

采用自组装成膜技术制备TiO2薄膜, 应用X射线光电子能谱研究自组装膜及其氧化膜和淀积的TiO2薄膜. 结果表明，硅烷偶联剂成功地组装在玻璃基片上，足够长时间的氧化对使端基（-SH）完全氧化为磺酸基. 淀积在基片上的TiO2膜牢固性好，平均膜厚在10nm．淀积膜中的钛可能有几种不同的氧化态，不同的酸度影响TiO2的淀积效果.

关键词: XPS, 自组装单层膜, TiO2薄膜

Abstract:

 X-ray photoelectron spectroscopy (XPS) was used to study the chemistry and film morphology during titanium oxide deposition from aqueous solution on functionalized surfaces prepared by oxidizing the end-functional groups self-assembled on glass. Longer treatment of SAMs with hydrogen peroxide in acetic acid resulted in efficient conversion of the terminal group (SH-) to a sulfonate group. The deposition of thin films in TiCl4 solution of varied acidity gave different yields. and there are different oxidation states of Ti in the TiO2 thin film. The thin film showed excellent adhearence.

Key words: XPS, Self-assembly monolayers, TiO2 thin films