物理化学学报 >> 2004, Vol. 20 >> Issue (02): 199-201.doi: 10.3866/PKU.WHXB20040219

研究简报 上一篇    下一篇

铝阳极氧化膜纳米孔阵列结构的自组织过程分析

巩运兰;王为;王惠;郭鹤桐   

  1. 天津大学化工学院,天津 300072; 天津商学院工程学院,天津 300134
  • 收稿日期:2003-06-20 修回日期:2003-09-04 发布日期:2004-02-15
  • 通讯作者: 王为 E-mail:wwangg@tju.edu.cn

The Analysis of Self-organizing Process of Anodic Alumina Films with Nano-pore Array Structure

Gong Yun-Lan;Wang Wei;Wang Hui;Guo He-Tong   

  1. Department of Applied Chemistry, School of Chemical Engineering, Tianjin University, Tianjin 300072; School of Engineering, Tianjin University of Commerce, Tianjin 300134
  • Received:2003-06-20 Revised:2003-09-04 Published:2004-02-15
  • Contact: Wang Wei E-mail:wwangg@tju.edu.cn

摘要: 提出了在铝阳极氧化膜的生长过程中存在两种力的作用,一种是在阻挡层形成时就已经存在的由于基体铝与氧化铝之间晶格不匹配产生的内应力的作用,另一种是随着纳米孔的形成,存在于纳米孔内壁的表面张力的作用.铝阳极氧化膜纳米孔阵列的自组织过程是在这两种力的共同作用下进行的.这两种力的大小随着纳米孔形貌的变化而改变,当铝阳极氧化膜中的纳米孔呈规则的六角排列时,这两种力达到平衡,此时体系的能量也最低.

关键词: 铝阳极氧化膜, 纳米孔阵列结构, 自组织, 内应力, 表面张力

Abstract: With the increase of the anodizing time, the nanoporous morphology of the anodic porous alumina film formed by anodizing Al in an oxalic acid solution will change from irregular to regular and the distribution of nanoporous will also change from disarray to regular hexangular array. The results indicated that there was high internal stress in the barrier layer due to the severe mismatch between the barrier layer formed in early anodization and the Al substrate. The release of the internal stress resulted in the origination of the numerous nanoporous in the surface of the barrier layer, which accordingly made the surface energy of oxide film increase quickly. The internal stress in the walls and the surface tension in the surface of nanoporous acted together in the anodization and determined the morphology and distribution of the nanoporous in each phase of the anodization. When these two forces reached a balance, the nanoporous possessed excellent uniformity in diameter and spacing of the holes. At this time, the energy of the system is at the lowest. The transition process from unbalance to balance of the these two forces is the internal drive in the selforganized process of the porous configuration from the initial irregular through to regular array.

Key words: Anodic alumina film, Nano-pore array structure, Self-organize, Inner stress, Surface tension