物理化学学报 >> 2010, Vol. 26 >> Issue (10): 2840-2844.doi: 10.3866/PKU.WHXB20101024

材料物理化学 上一篇    下一篇

Sn 掺杂ZnO 纳米针的结构及其生长机制

王杰, 庄惠照, 薛成山, 李俊林, 徐鹏   

  1. 山东师范大学半导体研究所,济南250014
  • 收稿日期:2010-06-27 修回日期:2010-07-23 发布日期:2010-09-27
  • 通讯作者: 庄惠照 E-mail:zhuanghuizhao@sdnu.edu.cn
  • 基金资助:

    国家自然科学基金重大研究项目(90201025, 90301002)资助

Structure and Formation Mechanism of Sn-Doped ZnO Nanoneedles

WANG Jie, ZHUANG Hui-Zhao, XUE Cheng-Shan, LI Jun-Lin, XU Peng   

  1. Institute of Semiconductors, Shandong Normal University, Jinan 250014, P. R. China
  • Received:2010-06-27 Revised:2010-07-23 Published:2010-09-27
  • Contact: ZHUANG Hui-Zhao E-mail:zhuanghuizhao@sdnu.edu.cn
  • Supported by:

    The project was supported by the National Natural Science Foundation of China (90201025, 90301002).

摘要:

利用包括磁控溅射和热氧化的两步法在Si(111) 衬底上制备了Sn 掺杂ZnO 纳米针. 首先用磁控溅射法在Si(111) 衬底上制备Sn:Zn 薄膜, 然后在650oC的Ar 气氛中对薄膜进行热氧化, 制备出Sn 掺杂ZnO 纳米针. 样品的结构、成分和光学性质采用X 射线衍射(XRD) 、扫描电子显微镜(SEM) 、透射电子显微镜(TEM) 、高分辨透射电子显微镜(HRTEM) 、能量散射X 射线(EDX) 谱和光致发光(PL) 光谱等技术手段进行分析. 结果表明, 制备的样品为具有六方纤锌矿结构的单晶Sn 掺杂ZnO 纳米针, Sn 掺杂量为2.5%(x, 原子比), 底部和头部直径分别为200-500 nm 和40 nm, 长度为1-3 μm, 结晶质量较高. 室温光致发光光谱显示紫外发光峰比纯ZnO 的发光峰稍有蓝移, 这可归因于能谱分析中探测到的Sn 的影响. 基于本实验的实际条件, 简单探讨了Sn 掺杂ZnO 纳米针的生长机制.

关键词: 纳米结构, ZnO, Sn 掺杂, 溅射, 光学特性, 生长机制

Abstract:

We synthesized Sn -doped ZnO nanoneedles on Si(111) substrates in two steps: sputtering and thermal oxidation. First, a thin layer of the Sn :Zn films was deposited onto the Si(111) substrates ina JCK -500A radio -frequency magnetron sputtering system. Sn-doped ZnO nanoneedles were then grown by simple thermal oxidation of the as-deposited films at 650 oC in Ar atmosphere. The structural, componential, and optical properties of the samples were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM), high -resolution transmission electron microscopy (HRTEM), energy dispersive X-ray (EDX) spectroscopy, and photoluminescence (PL) spectroscopy. The results reveal that the ZnO nanoneedles doped with 2.5%(x, atomic ratio) Sn are single crystalline with a wurtzite hexagonal structure. The lengths of the grown nanoneedles vary between 1 and 3μm. The root diameters of the needles range between 200 and 500 nm while the tips have an average diameter of about 40 nm. Moreover, most of the Sn-doped ZnO nanoneedles are of high crystal quality. Room temperature PL spectroscopy shows a blue-shift from the bulk bandgap emission, which can be attributed toa Sn composition in the nanoneedles as detected by EDX. Based on the reaction conditions, the growth mechanism of the Sn-doped ZnO nanoneedles was also discussed.

Key words: Nanostructure, ZnO, Sn-doping, Sputtering, Optical property, Formation mechanism

MSC2000: 

  • O649