物理化学学报 >> 2012, Vol. 28 >> Issue (05): 1197-1205.doi: 10.3866/PKU.WHXB201202231

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PEG和PVP改性溶胶-凝胶二氧化硅减反膜的对比

田红1, 张磊2, 徐耀1, 吴东1, 吴忠华3, 吕海兵4, 袁晓东4   

  1. 1. 中国科学院山西煤炭化学研究所, 中国科学院炭材料重点实验室, 太原030001;
    2. 河南理工大学理化学院, 河南焦作454000;
    3. 中国科学院高能物理研究所, 同步辐射实验室, 北京100049;
    4. 中国工程物理研究院激光聚变研究中心, 四川绵阳621900
  • 收稿日期:2011-10-25 修回日期:2012-01-19 发布日期:2012-04-26
  • 通讯作者: 徐耀 E-mail:xuyao@sxicc.ac.cn
  • 基金资助:

    国家自然科学基金(10835008)资助项目

Comparision of Silica Anti-Reflective Films Obtained via a Sol-Gel Process in the Presence of PEG or PVP

TIAN Hong1, ZHANG -Lei2, XU Yao1, WU Dong1, WU Zhong-Hua3, LÜ Hai-Bing4, YUAN Xiao-Dong4   

  1. 1. CAS Key Laboratory for Carbon, Institute of Coal Chemistry, Chinese Academy of Sciences, Taiyuan 030001, P. R. China;
    2. College of Science, Henan Polytechnic University, Jiaozuo 454003, Henan Province, P. R. China;
    3. Laboratory of Synchrotron Radiation, Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, P. R. China;
    4. Laer Fusion Research Center,Chinese Academy of Engineering Physics, Mianyang 621900, Sichuan Province, P. R. China
  • Received:2011-10-25 Revised:2012-01-19 Published:2012-04-26
  • Contact: XU Yao E-mail:xuyao@sxicc.ac.cn
  • Supported by:

    The project was supported by the National Natural Science Foundation of China (10835008).

摘要: 聚乙二醇(PEG)和聚乙烯吡咯烷酮(PVP)对溶胶-凝胶二氧化硅减反膜的结构和激光损伤阈值有不同的影响. 动态光散射、透射电镜(TEM)以及小角X射线散射实验表明: PEG能够促进二氧化硅颗粒的生长并增加团簇生长的一致性. 然而,在PVP改性的溶胶中, Si―OH与PVP之间氢键作用制约了二氧化硅颗粒的生长. 此外, 多重分形谱(MFS)分析表明, PEG可以提高氧化硅薄膜的均匀性, PVP却降低了薄膜的均匀性, 因此, PEG改性的氧化硅薄膜的抗激光损伤性能增强, 而PVP改性的氧化硅薄膜的抗激光损伤性能被削弱. 固体29Si 魔角旋转核磁共振(MAS NMR)结果表明, PEG能够提高Si―O四面体缩聚程度并改善薄膜的表面分形结构, PVP则相反, 导致了PEG改性的氧化硅薄膜与PVP改性的氧化硅薄膜具有不同的抗激光损伤性能.

关键词: 激光损伤阈值, 减反射, 光学膜, 表面分形

Abstract: The different effects of poly(ethylene glycol) (PEG) and poly(vinylpyrrolidone) (PVP) on the structure and laser-induced damage threshold of sol-gel silica anti-reflective films were investigated. The results of dynamic light-scattering, transmission electron microscopy (TEM), and small-angle X-ray scattering (SAXS) showed that PEG could prompt silica particles to form uniform clusters, whereas in the PVP-modified sol, the growth of silica particles was restricted. This was a result of the strong hydrogen bonds between Si―OH groups and PVP molecules Multi-fractal spectrum (MFS) analysis suggested that PEG improved the uniformity of the silica film but PVP reduced it, therefore the laser-damage resistance of the PEG-modified silica film was enhanced, but that of the PVP-modified silica film was weakened. 29Si magic-angle spinning nuclear magnetic responance (MAS NMR) showed that PEG improved the condensation of Si ―O tetrahedron, but PVP did not. This led to differences between the laser-damage resistances of PEG-modified silica films and PVP-modified silica films.

Key words: Laser-induced damage, Anti-reflection, Optical film, Surface fractal

MSC2000: 

  • O648