物理化学学报 >> 2016, Vol. 32 >> Issue (4): 1005-1011.doi: 10.3866/PKU.WHXB201601111

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基于p-6P异质诱导生长酞菁铜薄膜的NO2传感器

李占国2,张玉婷2,谢强1,李亨利1,孙丽晶3,宋晓峰1,王丽娟1,*()   

  1. 1 长春工业大学化学工程学院, 长春 130012
    2 长春理工大学, 高功率半导体激光国家重点实验室, 长春 130022
    3 长春工业大学基础科学学院, 长春 130012
  • 收稿日期:2015-10-06 发布日期:2016-04-07
  • 通讯作者: 王丽娟 E-mail:wlj15@163.com
  • 基金资助:
    国家自然科学基金(21403016);吉林省科技发展计划(20130102065JC, 20140520139JH);吉林省教育厅项目(2015103)

NO2 Sensors Based on p-6P Heterogametic Induction Growth of Copper Phthalocyanine Thin Films

Zhan-Guo LI2,Yu-Ting ZHANG2,Qiang XIE1,Heng-Li LI1,Li-Jing SUN3,Xiao-Feng SONG1,Li-Juan WANG1,*()   

  1. 1 School of Chemical Engineering, Changchun University of Technology, Changchun 130012, P. R. China
    2 State Key Laboratory on High Power Semiconductor Lasers, Changchun University of Science and Technology, Changchun 130022, P. R. China
    3 School of Basic Sciences, Changchun University of Technology, Changchun 130012, P. R. China
  • Received:2015-10-06 Published:2016-04-07
  • Contact: Li-Juan WANG E-mail:wlj15@163.com
  • Supported by:
    the National Natural Science Foundation of China(21403016);Key Program for Science and Technology Development of Jilin Province, China(20130102065JC, 20140520139JH);Scientific Research Foundation of Education Department of Jilin Province, China(2015103)

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摘要：

为实现室温下低浓度NO2气体检测,制作了p-六联苯(p-6P)诱导层的酞菁铜有机薄膜传感器。利用原子力显微镜(AFM)研究了不同沉积速率下p-6P薄膜的生长规律,慢速沉积提供足够的分子扩散时间,利于薄膜横向生长,形成高度低、尺寸大的晶畴。在p-6P薄膜上生长了酞菁铜薄膜,可以清晰看到晶畴上酞菁铜薄膜的有序排列。利用X射线衍射(XRD)仪,阐明了p-6P对酞菁铜薄膜具有很好的诱导效应。通过对比不同沉积速率p-6P薄膜诱导的酞菁铜传感器性能,发现慢速沉积诱导层的酞菁铜器件有高的响应强度和低的回复时间。异质诱导生长的酞菁铜传感器响应强度是直接生长在二氧化硅上的酞菁铜传感器的2倍,回复时间是3.2 min,对浓度为1.0 × 10-5的NO2气体灵敏。

关键词: p-六联苯, 酞菁铜, 薄膜传感器, 异质诱导

Abstract:

To realize low concentration NO2 detection at room temperature, copper phthalocyanine (CuPc) organic thin filmsensors are fabricated by using a para-hexaphenyl (p-6P) filmas the inducing layer. The growing characteristics of the p-6P film at different deposition rates are investigated by atomic force microscopy (AFM). At a low deposition rate, the p-6P film exhibited a horizontal growth mode. The large and thin domains were obtained owing to the sufficient diffusion time to the island. A CuPc thin film grown on p-6P film showed high order alignments, as observed by the AFM morphology. The CuPc films grew on the optimizing p-6P film by the weak epitaxial technique. The induction effect of the p-6P film to CuPc films was clearly observed by X-ray diffraction (XRD). By comparing the gas response effects of different deposition rates of the p-6P film, a high response intensity and recovery time were achieved at a low deposition rate. Thus, the performances of the CuPc film sensor were significantly improved by the inducing growth of p-6P thin films. The response intensity was twice that of CuPc thin films on silicon dioxide. The recovery time was 3.2 min and the detection concentration for NO2 gas was 1.0 × 10-5.

Key words: Para-hexaphenyl, Copper phthalocyanine, Thin film sensor, Heterogenetic induction

MSC2000: 

  • O649