紫外光解法在制备低介电常数氧化硅分子筛薄膜中的应用
袁昊;李庆华;沙菲;解丽丽;田震;王利军
Application of Ultraviolet Treatment in the Synthesis of Pure-silica Zeolite Thin Films with Low Dielectric Constant
YUAN Hao; LI Qing-Hua; SHA Fei; XIE Li-Li; TIAN Zhen; WANG Li-Jun
物理化学学报 . 2007, (08): 1219 -1223 .  DOI: 10.3866/PKU.WHXB20070815