热压烧结靶材制备氧化铟锌薄膜晶体管
宋二龙,兰林锋,林振国,孙圣,宋威,李育智,高沛雄,张鹏,彭俊彪
Preparation of Indium-Zinc-Oxide Thin Film Transistors by Hot-Pressing Sintering Target
Er-Long SONG,Lin-Feng LAN,Zhen-Guo LIN,Sheng SUN,Wei SONG,Yu-Zhi LI,Pei-Xiong GAO,Peng ZHANG,Jun-Biao PENG
物理化学学报 . 2017, (10): 2092 -2098 .  DOI: 10.3866/PKU.WHXB201705114