Acta Phys. -Chim. Sin. ›› 1993, Vol. 9 ›› Issue (02): 211-217.doi: 10.3866/PKU.WHXB19930213

• ARTICLE • Previous Articles     Next Articles

AES Chemical Shift and Application on Surface Chemistry

Zhu Yong-Fa   

  1. Analysis Center, Tsinghua University, Beijing 100084
  • Received:1991-12-17 Revised:1992-07-06 Published:1993-04-15
  • Contact: Zhu Yong-Fa

Abstract: The relationship of AES chemical shift with clement valence and electronegativity is discussed. It has also offered Auger electron kinetic energy and chemical shift data of various compounds. Besides, we apply AES chemical shift to study the adsorption of oxygen on zinc. This method can distinguish the states of zinc and oxygen. The interface reaction mechanism of Ti/SiO_2 during RTA treatment was explained with this method and the structure of lubrication film can be studied by AES.

Key words: AES(Auger electron spectroscopy), Chemical shift, Surface chemistry