Abstract: By changing the sputtering conditions, Fe∶NiOx films with different catalytic behaviors were fabricated. With the increase of working pressure the overpotential in 100 mA•cm-2 changed from 780 mV at 1.0 Pa to 330 mV at 4.0 Pa. At the same time the Tafel slop also decreased dramatically from 71 mV•dec-1 to 53 mV•dec-1. Then by further analysis of EDX, XRD, XPS, SEM, we found that the crystallinity and the effective reactive surface area, especially the content of Ni3+, all can affect the catalytic properties. Lastly, we studied the transmittance of Fe:NiOx film in the range of visible light. But as the anode catalytic film, the transmittance of Fe:NiOx film is poor, especially with the increase of depth.

Key words: Oxygen evolution reaction, Catalytic film, Hydrogen production, Overpotential, Magnetron sputtering