介孔硅与大孔硅的结构、电学和气敏特性

doi:10.3866/PKU.WHXB201111212

Abstract

Abstract: Two different kinds of porous silicon (PS) were grown by electrochemical corrosion in a double-tank cell on the surface of single-crystalline P-type silicon. According to their pore sizes, they were denoted as meso-porous silicon (meso-PS) and macro-porous silicon (macro-PS). The surface and cross-section morphologies of the PS were observed by scanning electron microscope (SEM). The surface chemical bonds of the meso-PS and macro-PS were investigated by Fourier transform infrared (FTIR) spectroscopy. The electrical properties of the PS were studied by measuring the I-V characteristics. The gas sensing properties of meso-PS and macro-PS were thoroughly measured at room temperature. Meso-PS has much higher sensitivity, while macro-PS has better response-recovery characteristics. Meso-PS shows better selectivity for NO₂, while macro-PS shows better selectivity for NH₃.

Key words: Meso-porous silicon, Macro-porous silicon, Room temperature, Gas sensing property

MSC2000:

O647

SUN Peng, HU Ming, LI Ming-Da, MA Shuang-Yun. Microstructure, Electrical and Gas Sensing Properties of Meso-Porous Silicon and Macro-Porous Silicon[J].Acta Phys. -Chim. Sin., 2012, 28(02): 489-493.

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Microstructure, Electrical and Gas Sensing Properties of Meso-Porous Silicon and Macro-Porous Silicon

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