介孔硅与大孔硅的结构、电学和气敏特性

doi:10.3866/PKU.WHXB201111212

Abstract

Abstract: Two different kinds of porous silicon (PS) were grown by electrochemical corrosion in a double-tank cell on the surface of single-crystalline P-type silicon. According to their pore sizes, they were denoted as meso-porous silicon (meso-PS) and macro-porous silicon (macro-PS). The surface and cross-section morphologies of the PS were observed by scanning electron microscope (SEM). The surface chemical bonds of the meso-PS and macro-PS were investigated by Fourier transform infrared (FTIR) spectroscopy. The electrical properties of the PS were studied by measuring the I-V characteristics. The gas sensing properties of meso-PS and macro-PS were thoroughly measured at room temperature. Meso-PS has much higher sensitivity, while macro-PS has better response-recovery characteristics. Meso-PS shows better selectivity for NO₂, while macro-PS shows better selectivity for NH₃.

Key words: Meso-porous silicon, Macro-porous silicon, Room temperature, Gas sensing property

MSC2000:

O647

SUN Peng, HU Ming, LI Ming-Da, MA Shuang-Yun. Microstructure, Electrical and Gas Sensing Properties of Meso-Porous Silicon and Macro-Porous Silicon[J].Acta Phys. -Chim. Sin., 2012, 28(02): 489-493.

References

(1) Gao, Y.; Li, X.; Gong, J.; Fan, B.; Su, Z.; Qu, L. J. Phys. Chem. C 2008, 112, 8215.

(2) Li,W.; Hoa, N. D.; Kim, D. Sensor Actuat. B-Chem. 2010, 149, 184.

(3) Slobodian, P.; Riha, P.; Lengalova, A.; Svoboda, P.; Saha, P. Carbon 2011, 49, 2499
(4) Calestani, D.; Zha, M.; Mosca, R.; Zappettini, A.; Carotta, M. C.; Natale, V. D.; Zanotti, L. Sensor Actuat. B-Chem. 2010, 144, 472.

(5) Qin, Y. X.; Hu, M.; Zhang, J. Sensor Actuat. B-Chem. 2010, 150, 339.

(6) Yu, L. M.; Fan, X. H.; Qi, L. J.; Ma, L. H.; Yan,W. Appl. Surf. Sci. 2011, 257, 3140.

(7) Ozdemir, S.; Gole, J. L. Curr. Opin. Solid State Mat . Sci. 2007, 11, 92.

(8) Jalkanen, T.; Tuura, J.; Mäkilä, E; Salonen, J. Sensor Actuat. B-Chem. 2010, 147, 100.

(9) Kim, H. J.; Kim, Y. Y.; Lee, K.W. Curr. Appl. Phys. 2010, 10, 181.

(10) Yang, H. B.; Hu, M.; Liang, J. R.; Zhang, X. R.; Liu, Z. G. Acta Phys . -Chim. Sin. 2008, 24, 1017. [杨海波, 胡明, 梁继然, 张旭瑞, 刘志刚. 物理化学学报, 2008, 24, 1017.]
(11) Vinod, P. N. J. Alloy. Compd. 2009, 470, 393.

(12) Sun, F. Y.; Hu, M.; Sun, P.; Zhang, J.; Liu, B. J. Nanosci. Nanotechnol. 2010, 10, 7739.

(13) Tian, J.; Zheng, D.; Zhang, X. G.; Zhang, B. H.; Xia, B. J.; Yang, H. Acta Phys . -Chim. Sin. 2007, 23, 68. [田娟, 郑丹, 张熙贵, 张宝宏, 夏保佳, 杨辉. 物理化学学报, 2007, 23, 68.]
(14) Esmer, K.; Kayahan, E. Appl. Surf. Sci. 2009, 256, 1548.

(15) Canham, L. T. Appl. Phys. Lett. 1990, 57, 1046.

(16) Ali, N. K.; Hashim, M. R.; Aziz, A. A. Solid. State Electron. 2008, 52, 1071.

(17) Martinez, H. M.; Rincon, N. E.; Torres, J.; Alfonso, J. E. Microelectron. J. 2008, 39, 1354.

(18) Lewis, S. E.; DeBoer, J. R.; Gole, J. L.; Hesketh, P. J. Sensor Actuat. B-Chem. 2005, 110, 54.

(19) Khoshnevis, S.; Dariani, R. S.; Azim-Araghi, M. E.; Bayindir, Z.; Robbie, K. Thin Solid Films 2006, 515, 2650.

(20) Barillaro, G.; Strambini, L. M. Sensor Actuat. B-Chem. 2008, 134, 585.

(21) Mizsei, J. Thin Solid Films 2007, 515, 8310.

(22) Luongo, K.; Sine, A.; Bhansali, S. Sensor Actuat. B-Chem. 2005, 111-112, 125.
(23) Galstyan, V. E.; Martirosyan, K. S.; Aroutiounian, V. M.; Arakelyan, V. M.; Arakelyan, A. H.; Soukiassian, P. G. Thin Solid Films 2008, 517, 239.

(24) Chakane, S.; Gokarna, A.; Bhoraskar, S. V. Sensor Actuat. B-Chem. 2003, 92, 1.

(25) Boarino, L.; Baratto, C.; Geobaldo, F.; Amato, G.; Comini, E.; Rossi, A. M.; Faglia, G.; Lérondel, G.; Sberveglieri, G. Mater. Sci. Eng. B-Adv. 2000, 69-70, 210.
(26) Kanungo, J.; Saha, H.; Basu, S. Sensor Actuat. B-Chem. 2010, 147, 145.

(27) Fang, Z. Q.; Hu, M.; Zhang,W.; Zhang, X. R.; Yang, H. B. Thin Solid Films 2009, 517, 2930.

(28) Du, X.W.; Jin, Y.; Zhao, N. Q.; Fu, Y. S.; Kulinich, S. A. Appl. Surf. Sci. 2008, 254, 2479.

(29) Razi, F.; Rahimi, F.; Zad, A. I. Sensor Actuat. B-Chem. 2008, 132, 40.

(30) Xie, F. Q.; von Blanckenhagen, P. Appl. Phys. Lett. 1999, 75, 3144.

(31) Salgado, G. G.; Becerril, T. D.; Santiesteban, H. J.; Andrés, E. R. Opt. Mater. 2006, 29, 51.

(32) Pancheri, L.; Oton, C. J.; Gaburro, Z.; Soncini, G.; Pavesi, L. Sensor Actuat. B-Chem. 2004, 97, 45.

(33) Yang, G.; He, J. T.; Li, X. J.; Liang, E. J. Journal of Transducer Technology 2004, 23, 7. [杨光, 何金田, 李新建, 梁二军. 传感器技术, 2004, 23, 7.]
(34) Urbanowicz, A. M.; Shamiryan, D.; Zaka, A.; Verdonck, P.; De Gendt, S.; Baklanov, M. R. J. Electrochem. Soc. 2010, 157, H565.

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Microstructure, Electrical and Gas Sensing Properties of Meso-Porous Silicon and Macro-Porous Silicon

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