Acta Phys. -Chim. Sin. ›› 2012, Vol. 28 ›› Issue (02): 489-493.doi: 10.3866/PKU.WHXB201111212

• PHYSICAL CHEMISTRY OF MATERIALS • Previous Articles     Next Articles

Microstructure, Electrical and Gas Sensing Properties of Meso-Porous Silicon and Macro-Porous Silicon

SUN Peng, HU Ming, LI Ming-Da, MA Shuang-Yun   

  1. School of Electronic and Information Engineering, Tianjin University, Tianjin 300072, P. R. China
  • Received:2011-10-13 Revised:2011-11-16 Published:2012-01-11
  • Contact: SUN Peng
  • Supported by:

    The project was supported by the National Natural Science Foundation of China (60771019) and Tianjin Key Research Program of Application Foundation and Advanced Technology, China (11JCZDJC15300).

Abstract: Two different kinds of porous silicon (PS) were grown by electrochemical corrosion in a double-tank cell on the surface of single-crystalline P-type silicon. According to their pore sizes, they were denoted as meso-porous silicon (meso-PS) and macro-porous silicon (macro-PS). The surface and cross-section morphologies of the PS were observed by scanning electron microscope (SEM). The surface chemical bonds of the meso-PS and macro-PS were investigated by Fourier transform infrared (FTIR) spectroscopy. The electrical properties of the PS were studied by measuring the I-V characteristics. The gas sensing properties of meso-PS and macro-PS were thoroughly measured at room temperature. Meso-PS has much higher sensitivity, while macro-PS has better response-recovery characteristics. Meso-PS shows better selectivity for NO2, while macro-PS shows better selectivity for NH3.

Key words: Meso-porous silicon, Macro-porous silicon, Room temperature, Gas sensing property


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