nc-Si:H/c-Si硅异质结太阳电池中本征硅薄膜钝化层的优化

doi:10.3866/PKU.WHXB201504142

Abstract

Abstract:

A series of intrinsic silicon thin films were prepared using radio- frequency plasma-enhanced chemical vapor deposition (RF-PECVD) at low temperature and low power density. We investigated the influence of silane concentration (C_S) on the structural, optical, and electronic properties, and passivation quality of the intrinsic silicon films, and the performances of hydrogenated nanocrystalline silicon/crystalline silicon (nc-Si:H/ c-Si) silicon heterojunction (SHJ) solar cells. The results show that with decreasing silane concentration, substantial changes in the crystalline volume fraction, hydrogen concentration, structure factor, optical bandgap, and photosensitivity of the film take place in the transition zone. The passivation quality of intrinsic silicon thin films is decided by the hydrogen content and bonding structure of the film. Films close to the transition zone show good compactness and photosensitivities, high hydrogen content, and low state densities, and contain abundant SiH bonds. The films provide excellent passivation for c-Si surfaces and significantly enhance the open-circuit voltages of nc-Si:H/c-Si SHJ solar cells. However, the passivation quality deteriorates seriously when the film is too thin. In this work, the optimum silane concentration was found to be 6% (molar fraction). By optimizing the film thickness of the passivation layers with C_S=6%, we obtained an nc-Si:H/c-Si SHJ solar cell with an open-circuit voltage of 672 mV, short-circuit current density of 35.1 mA·cm^-2, fill factor of 0.73, and efficiency of 17.3%.

Key words: Intrinsic silicon thin film, Radio-frequency plasma enhanced chemical vapor deposition, Interface passivation, Minority carrier lifetime, Silicon heterojunction solar cell

MSC2000:

O649

QIAO Zhi, XIE Xin-Jian, XUE Jun-Ming, LIU Hui, LIANG Li-Min, HAO Qiu-Yan, LIU Cai-Chi. Optimization of Intrinsic Silicon Passivation Layers in nc-Si:H/c-Si Silicon Heterojunction Solar Cells[J].Acta Phys. -Chim. Sin., 2015, 31(6): 1207-1214.

References

(1) Wang, L. G.; Zhang, X. D.; Wang, F. Y.; Wang, N.; Jiang, Y. J.; Hao, Q. Y.; Xu, S. Z.; Wei, C. C.; Zhao, Y. Acta Phys. -Chim. Sin. 2014, 30 (9), 1758. [王利果, 张晓丹, 王奉友, 王宁, 姜元建, 郝秋艳, 许盛之, 魏长春, 赵颖. 物理化学学报, 2014, 30 (9), 1758.] doi: 10.3866/PKU.WHXB201406301
(2) Zeman, M.; Zhang, D. Heterojunction Silicon Based Solar Cells. In Physics and Technology of Amorphous-Crystalline Heterostructure Silicon Solar Cells; Springer: Verlag, Berlin, Heidelberg, 2012; pp 13-43.
(3) DeWolf, S.; Demaurex, B.; Descoeudres, A.; Ballif, C. Phys. Rev. B 2011, 83 (23), 233301. doi: 10.1103/ PhysRevB.83.233301
(4) Zhao, L.; Zhou, C.; Li, H.; Diao, H.; Wang, W. Sol. Energy Mater. Sol. Cells 2008, 92 (6), 673. doi: 10.1016/j. solmat.2008.01.018
(5) Dao, V. A.; Heo, J.; Choi, H.; Kim, Y.; Park, S.; Jung, S.; Lakshminarayan, N.; Yi, J. Sol. Energy 2010, 84 (5), 777. doi: 10.1016/j.solener.2010.01.029
(6) Kim, S.; Dao, V. A.; Lee, Y.; Shin, C.; Park, J.; Cho, J.; Yi, J. Sol. Energy Mater. Sol. Cells 2013, 117, 174. doi: 10.1016/j.solmat.2013.05.042
(7) Gogolin, R.; Ferré, R.; Turcu, M.; Harder, N. P. Sol. Energy Mater. Sol. Cells 2012, 106, 47. doi: 10.1016/j.solmat.2012.06.001
(8) Gielis, J.; Van Den Oever, P.; Hoex, B.; Van De Sanden, M.; Kessels, W. Phys. Rev. B 2008, 77 (20), 205329. doi: 10.1103/PhysRevB.77.205329
(9) Descoeudres, A.; Barraud, L.; DeWolf, S.; Strahm, B.; Lachenal, D.; Guérin, C.; Holman, Z.; Zicarelli, F.; Demaurex, B.; Seif, J. Appl. Phys. Lett. 2011, 99 (12), 123506. doi: 10.1063/1.3641899
(10) Mews, M.; Schulze, T. F.; Mingirulli, N.; Korte, L. Appl. Phys. Lett. 2013, 102 (12), 122106. doi: 10.1063/1.4798292
(11) Qiao, Z.; Xie, X.; Hao, Q.; Wen, D.; Xue, J.; Liu, C. Appl. Surf. Sci. 2015, 324, 152. doi: 10.1016/j.apsusc.2014.10.091
(12) Dong, L. L.; Wang, Y. Y.; Tong, X. L.; Jin, G. Q.; Guo, X. Y. Acta Phys. -Chim. Sin. 2014, 30 (1), 135. [董莉莉, 王英勇, 童希立, 靳国强, 郭向云. 物理化学学报, 2014, 30 (1), 135.] doi: 10.3866/PKU.WHXB201311052
(13) Kaneko, T.; Wakagi, M.; Onisawa, K. I.; Minemura, T. Appl. Phys. Lett. 1994, 64 (14), 1865. doi: 10.1063/1.111781
(14) He, Y.; Yin, C.; Cheng, G.; Wang, L.; Liu, X.; Hu, G. J. Appl. Phys. 1994, 75 (2), 797. doi: 10.1063/1.356432
(15) Matsuda, A. Thin Solid Films 1999, 337 (1), 1.
(16) Tsai, C.; Anderson, G.; Thompson, R.; Wacker, B. J. Non-Cryst. Solids 1989, 114, 151. doi: 10.1016/0022-3093(89)90096-3
(17) Gope, J.; Kumar, S.; Sudhakar, S.; Lodhi, K.; Rauthan, C.; Srivastava, P. Journal of Alloys and Compounds 2013, 577, 710. doi: 10.1016/j.jallcom.2013.05.142
(18) Kroll, U.; Meier, J.; Shah, A.; Mikhailov, S.; Weber, J. J. Appl. Phys. 1996, 80 (9), 4971. doi: 10.1063/1.363541
(19) Zhang, S.; Liao, X.; Raniero, L.; Fortunato, E.; Xu, Y.; Kong, G.; Aguas, H.; Ferreira, I.; Martins, R. Sol. Energy Mater. Sol. Cells 2006, 90 (18), 3001.
(20) Ray, S.; Mukhopadhyay, S.; Jana, T.; Carius, R. J. Non-Cryst. Solids 2002, 299, 761.
(21) Chang, T. H.; Chang, J. Y.; Chu, Y. H.; Lee, C. C.; Chen, I. C.; Li, T. Surf. Coat. Technol. 2013, 231, 604. doi: 10.1016/j.surfcoat.2012.10.008
(22) Bakr, N.; Funde, A.; Waman, V.; Kamble, M.; Hawaldar, R.; Amalnerkar, D.; Sathe, V.; Gosavi, S.; Jadkar, S. J. Phys. Chem. Solids 2011, 72 (6), 685. doi: 10.1016/j.jpcs.2011.02.019
(23) Waman, V.; Kamble, M.; Pramod, M.; Funde, A.; Sathe, V.; Gosavi, S.; Jadkar, S. In Structural and Optical Investigations of nc-Si:H Thin Films Prepared by Hot-Wire Method; American Institute of Physics Conference Series, 2011; pp 155-157.
(24) VavruHková, V.; Müllerová, J.; Srnánek, R.; Šutta, P. Vacuum 2009, 84 (1), 123. doi: 10.1016/j.vacuum.2009.05.022
(25) Zhao, L.; Diao, H.W.; Zeng, X. B.; Zhou, C. L.; Li, H. L.; Wang, W. J. Study on the Passivation Effect of the Crystalline Silicon Thin Film Surface. In Proceeding of 10th Solar Photovoltaic Conference-Welcome to Solar PV New Era; Zhejiang University Press: Hangzhou, 2008; pp 64-67. [赵雷, 刁宏伟, 曾湘波, 周春兰, 李海玲, 王文静. 晶硅表面薄膜硅钝化效果研究. In 第十届中国太阳能光伏会议论文集: 迎接光伏发电新时代, 杭州: 浙江大学出版社, 2008: 64-67.]
(26) Jensen, N.; Hausner, R.; Bergmann, R.; Werner, J.; Rau, U. Prog. Photovoltaics Res. Appl. 2002, 10 (1), 1.

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Optimization of Intrinsic Silicon Passivation Layers in nc-Si:H/c-Si Silicon Heterojunction Solar Cells

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