nc-Si:H/c-Si硅异质结太阳电池中本征硅薄膜钝化层的优化

doi:10.3866/PKU.WHXB201504142

Abstract

Abstract:

A series of intrinsic silicon thin films were prepared using radio- frequency plasma-enhanced chemical vapor deposition (RF-PECVD) at low temperature and low power density. We investigated the influence of silane concentration (C_S) on the structural, optical, and electronic properties, and passivation quality of the intrinsic silicon films, and the performances of hydrogenated nanocrystalline silicon/crystalline silicon (nc-Si:H/ c-Si) silicon heterojunction (SHJ) solar cells. The results show that with decreasing silane concentration, substantial changes in the crystalline volume fraction, hydrogen concentration, structure factor, optical bandgap, and photosensitivity of the film take place in the transition zone. The passivation quality of intrinsic silicon thin films is decided by the hydrogen content and bonding structure of the film. Films close to the transition zone show good compactness and photosensitivities, high hydrogen content, and low state densities, and contain abundant SiH bonds. The films provide excellent passivation for c-Si surfaces and significantly enhance the open-circuit voltages of nc-Si:H/c-Si SHJ solar cells. However, the passivation quality deteriorates seriously when the film is too thin. In this work, the optimum silane concentration was found to be 6% (molar fraction). By optimizing the film thickness of the passivation layers with C_S=6%, we obtained an nc-Si:H/c-Si SHJ solar cell with an open-circuit voltage of 672 mV, short-circuit current density of 35.1 mA·cm^-2, fill factor of 0.73, and efficiency of 17.3%.

Key words: Intrinsic silicon thin film, Radio-frequency plasma enhanced chemical vapor deposition, Interface passivation, Minority carrier lifetime, Silicon heterojunction solar cell

MSC2000:

O649

QIAO Zhi, XIE Xin-Jian, XUE Jun-Ming, LIU Hui, LIANG Li-Min, HAO Qiu-Yan, LIU Cai-Chi. Optimization of Intrinsic Silicon Passivation Layers in nc-Si:H/c-Si Silicon Heterojunction Solar Cells[J].Acta Phys. -Chim. Sin., 2015, 31(6): 1207-1214.

References

(1) Wang, L. G.; Zhang, X. D.; Wang, F. Y.; Wang, N.; Jiang, Y. J.; Hao, Q. Y.; Xu, S. Z.; Wei, C. C.; Zhao, Y. Acta Phys. -Chim. Sin. 2014, 30 (9), 1758. [王利果, 张晓丹, 王奉友, 王宁, 姜元建, 郝秋艳, 许盛之, 魏长春, 赵颖. 物理化学学报, 2014, 30 (9), 1758.] doi: 10.3866/PKU.WHXB201406301
(2) Zeman, M.; Zhang, D. Heterojunction Silicon Based Solar Cells. In Physics and Technology of Amorphous-Crystalline Heterostructure Silicon Solar Cells; Springer: Verlag, Berlin, Heidelberg, 2012; pp 13-43.
(3) DeWolf, S.; Demaurex, B.; Descoeudres, A.; Ballif, C. Phys. Rev. B 2011, 83 (23), 233301. doi: 10.1103/ PhysRevB.83.233301
(4) Zhao, L.; Zhou, C.; Li, H.; Diao, H.; Wang, W. Sol. Energy Mater. Sol. Cells 2008, 92 (6), 673. doi: 10.1016/j. solmat.2008.01.018
(5) Dao, V. A.; Heo, J.; Choi, H.; Kim, Y.; Park, S.; Jung, S.; Lakshminarayan, N.; Yi, J. Sol. Energy 2010, 84 (5), 777. doi: 10.1016/j.solener.2010.01.029
(6) Kim, S.; Dao, V. A.; Lee, Y.; Shin, C.; Park, J.; Cho, J.; Yi, J. Sol. Energy Mater. Sol. Cells 2013, 117, 174. doi: 10.1016/j.solmat.2013.05.042
(7) Gogolin, R.; Ferré, R.; Turcu, M.; Harder, N. P. Sol. Energy Mater. Sol. Cells 2012, 106, 47. doi: 10.1016/j.solmat.2012.06.001
(8) Gielis, J.; Van Den Oever, P.; Hoex, B.; Van De Sanden, M.; Kessels, W. Phys. Rev. B 2008, 77 (20), 205329. doi: 10.1103/PhysRevB.77.205329
(9) Descoeudres, A.; Barraud, L.; DeWolf, S.; Strahm, B.; Lachenal, D.; Guérin, C.; Holman, Z.; Zicarelli, F.; Demaurex, B.; Seif, J. Appl. Phys. Lett. 2011, 99 (12), 123506. doi: 10.1063/1.3641899
(10) Mews, M.; Schulze, T. F.; Mingirulli, N.; Korte, L. Appl. Phys. Lett. 2013, 102 (12), 122106. doi: 10.1063/1.4798292
(11) Qiao, Z.; Xie, X.; Hao, Q.; Wen, D.; Xue, J.; Liu, C. Appl. Surf. Sci. 2015, 324, 152. doi: 10.1016/j.apsusc.2014.10.091
(12) Dong, L. L.; Wang, Y. Y.; Tong, X. L.; Jin, G. Q.; Guo, X. Y. Acta Phys. -Chim. Sin. 2014, 30 (1), 135. [董莉莉, 王英勇, 童希立, 靳国强, 郭向云. 物理化学学报, 2014, 30 (1), 135.] doi: 10.3866/PKU.WHXB201311052
(13) Kaneko, T.; Wakagi, M.; Onisawa, K. I.; Minemura, T. Appl. Phys. Lett. 1994, 64 (14), 1865. doi: 10.1063/1.111781
(14) He, Y.; Yin, C.; Cheng, G.; Wang, L.; Liu, X.; Hu, G. J. Appl. Phys. 1994, 75 (2), 797. doi: 10.1063/1.356432
(15) Matsuda, A. Thin Solid Films 1999, 337 (1), 1.
(16) Tsai, C.; Anderson, G.; Thompson, R.; Wacker, B. J. Non-Cryst. Solids 1989, 114, 151. doi: 10.1016/0022-3093(89)90096-3
(17) Gope, J.; Kumar, S.; Sudhakar, S.; Lodhi, K.; Rauthan, C.; Srivastava, P. Journal of Alloys and Compounds 2013, 577, 710. doi: 10.1016/j.jallcom.2013.05.142
(18) Kroll, U.; Meier, J.; Shah, A.; Mikhailov, S.; Weber, J. J. Appl. Phys. 1996, 80 (9), 4971. doi: 10.1063/1.363541
(19) Zhang, S.; Liao, X.; Raniero, L.; Fortunato, E.; Xu, Y.; Kong, G.; Aguas, H.; Ferreira, I.; Martins, R. Sol. Energy Mater. Sol. Cells 2006, 90 (18), 3001.
(20) Ray, S.; Mukhopadhyay, S.; Jana, T.; Carius, R. J. Non-Cryst. Solids 2002, 299, 761.
(21) Chang, T. H.; Chang, J. Y.; Chu, Y. H.; Lee, C. C.; Chen, I. C.; Li, T. Surf. Coat. Technol. 2013, 231, 604. doi: 10.1016/j.surfcoat.2012.10.008
(22) Bakr, N.; Funde, A.; Waman, V.; Kamble, M.; Hawaldar, R.; Amalnerkar, D.; Sathe, V.; Gosavi, S.; Jadkar, S. J. Phys. Chem. Solids 2011, 72 (6), 685. doi: 10.1016/j.jpcs.2011.02.019
(23) Waman, V.; Kamble, M.; Pramod, M.; Funde, A.; Sathe, V.; Gosavi, S.; Jadkar, S. In Structural and Optical Investigations of nc-Si:H Thin Films Prepared by Hot-Wire Method; American Institute of Physics Conference Series, 2011; pp 155-157.
(24) VavruHková, V.; Müllerová, J.; Srnánek, R.; Šutta, P. Vacuum 2009, 84 (1), 123. doi: 10.1016/j.vacuum.2009.05.022
(25) Zhao, L.; Diao, H.W.; Zeng, X. B.; Zhou, C. L.; Li, H. L.; Wang, W. J. Study on the Passivation Effect of the Crystalline Silicon Thin Film Surface. In Proceeding of 10th Solar Photovoltaic Conference-Welcome to Solar PV New Era; Zhejiang University Press: Hangzhou, 2008; pp 64-67. [赵雷, 刁宏伟, 曾湘波, 周春兰, 李海玲, 王文静. 晶硅表面薄膜硅钝化效果研究. In 第十届中国太阳能光伏会议论文集: 迎接光伏发电新时代, 杭州: 浙江大学出版社, 2008: 64-67.]
(26) Jensen, N.; Hausner, R.; Bergmann, R.; Werner, J.; Rau, U. Prog. Photovoltaics Res. Appl. 2002, 10 (1), 1.

[1]	Bihao Zhuang, Zicong Jin, Dehua Tian, Suiyi Zhu, Linqian Zeng, Jiandong Fan, Zaizhu Lou, Wenzhe Li. Halogen Regulation for Enhanced Luminescence in Emerging (4-HBA)SbX₅∙H₂O Perovskite-Like Single Crystals [J]. Acta Phys. -Chim. Sin., 2023, 39(1): 2209007-0.
[2]	Jian Yang, Chen Lei, Xiang Liu, Jian Zhang, Yudie Sun, Cheng Zhang, Mingfu Ye, Kui Zhang. Versatile Performance of a Cationic Surfactant Derived from Carbon Quantum Dots [J]. Acta Phys. -Chim. Sin., 2022, 38(12): 2111030-.
[3]	Xiaoyun Xu, Hongbo Wu, Shijie Liang, Zheng Tang, Mengyang Li, Jing Wang, Xiang Wang, Jin Wen, Erjun Zhou, Weiwei Li, Zaifei Ma. Quantum Efficiency and Voltage Losses in P3HT: Non-fullerene Solar Cells [J]. Acta Phys. -Chim. Sin., 2022, 38(11): 2201039-.
[4]	Na Lu, Xuedong Jing, Yao Xu, Wei Lu, Kuichao Liu, Zhenyi Zhang. Effective Cascade Modulation of Charge-Carrier Kinetics in the Well Designed Multi-Component Nanofiber System for Highly-Efficient Photocatalytic Hydrogen Generation [J]. Acta Phys. -Chim. Sin., 0, (): 2207045-.
[5]	Ruoning Li, Xue Zhang, Na Xue, Jie Li, Tianhao Wu, Zhen Xu, Yifan Wang, Na Li, Hao Tang, Shimin Hou, Yongfeng Wang. Hierarchical Self-Assembly of Ag-Coordinated Motifs on Ag(111) [J]. Acta Phys. -Chim. Sin., 2022, 38(8): 2011060-.
[6]	Cheng Wang, Chi Zhang, Ruifeng Li, Qi Chen, Lei Qian, Liwei Chen. Charge Accumulation Behavior in Quantum Dot Light-Emitting Diodes [J]. Acta Phys. -Chim. Sin., 2022, 38(8): 2104030-.
[7]	Tianjie Wang, Yaowei Wang, Yuhui Chen, Jianpeng Liu, Huibing Shi, Limin Guo, Zhiwei Zhao, Chuntai Liu, Zhangquan Peng. Toward Practical Lithium-Air Batteries by Avoiding Negative Effects of CO₂ [J]. Acta Phys. -Chim. Sin., 2022, 38(8): 2009071-.
[8]	Yue Lu, Yang Ge, Manling Sui. Degradation Mechanism of CH₃NH₃PbI₃-based Perovskite Solar Cells under Ultraviolet Illumination [J]. Acta Phys. -Chim. Sin., 2022, 38(5): 2007088-.
[9]	Hongyu Liu, Gang Meng, Zanhong Deng, Meng Li, Junqing Chang, Tiantian Dai, Xiaodong Fang. Progress in Research on VOC Molecule Recognition by Semiconductor Sensors [J]. Acta Phys. -Chim. Sin., 2022, 38(5): 2008018-.
[10]	Yuhao Yin, Yang Shen, Hu Wang, Xiao Chen, Lin Shao, Wenyu Hua, Juan Wang, Yi Cui. In Situ Growth and Characterization of TiN/Hf_xZr_1-xO₂/TiN Ferroelectric Capacitors [J]. Acta Phys. -Chim. Sin., 2022, 38(5): 2006016-.
[11]	Feiyu Lin, Ying Yang, Congtan Zhu, Tian Chen, Shupeng Ma, Yuan Luo, Liu Zhu, Xueyi Guo. Fabrication of Stable CsPbI₂Br Perovskite Solar Cells in the Humid Air [J]. Acta Phys. -Chim. Sin., 2022, 38(4): 2005007-.
[12]	Yishun Yang, Min Zhou, Yanxia Xing. Symmetry-Dependent Transport Properties of γ-Graphyne-based Molecular Magnetic Tunnel Junctions [J]. Acta Phys. -Chim. Sin., 2022, 38(4): 2003004-.
[13]	Wusong Zha, Lianping Zhang, Long Wen, Jiachen Kang, Qun Luo, Qin Chen, Shangfeng Yang, Chang-Qi Ma. Controllable Formation of PbI₂ and PbI₂(DMSO) Nano Domains in Perovskite Films through Precursor Solvent Engineering [J]. Acta Phys. -Chim. Sin., 2022, 38(3): 2003022-.
[14]	Yuqi Wang, Miaocheng Zhang, Wei Xu, Xinyi Shen, Fei Gao, Jiale Zhu, Xiang Wan, Xiaojuan Lian, Jianguang Xu, Yi Tong. Chemical Preparation of New Ti₃C₂ MXene and the Performance and Mechanism of Memristor Based on MXene [J]. Acta Phys. -Chim. Sin., 2022, 38(3): 1907076-.
[15]	Houfu Song, Feiyu Kang. Recent Progress on Thermal Conduction of Graphene [J]. Acta Phys. -Chim. Sin., 2022, 38(1): 2101013-.

Optimization of Intrinsic Silicon Passivation Layers in nc-Si:H/c-Si Silicon Heterojunction Solar Cells

PDF

Like

Knowledge

Abstract

Cite this article

share this article

References

Related Articles 15

Metrics

Recommended 0