Acta Phys. -Chim. Sin. ›› 1992, Vol. 8 ›› Issue (03): 383-388.doi: 10.3866/PKU.WHXB19920318

• ARTICLE • Previous Articles     Next Articles

Optical Emission Spectroscopy in Diamond-Like Carbon Film Deposition

Zhang Wei-Ping; Chen Jing; Fang Rong-Chun; Hu Ke-Liang   

  1. Department of Physics, University of science and Technology of China, Hefei 230026
  • Received:1991-02-10 Revised:1991-10-06 Published:1992-06-15
  • Contact: Zhang Wei-Ping

Abstract: We measured the optical emission spectra (OES) of glow discharged plasma of methane in the diamond-like carbon film deposition and analyzed the relationship between the OES and the deposition parameters, such as rf power, gas pressure and the distances from the lower electrode.
The infrared absorption of films were also measured and the results of infrared absorption were compared with that of OES measurement.

Key words: Optical emission spectroscopy, Glow discharge, Diamond-like carbon film