Acta Phys. -Chim. Sin. ›› 2008, Vol. 24 ›› Issue (07): 1307-1312.doi: 10.3866/PKU.WHXB20080732

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Electrochemical Micromachining Microstructure Lattice on Magnesium Alloy Surface

JIANG Li-Min; CHENG Ze-Yu; DU Nan; LI Wei; TIAN Zhong-Qun; TIAN Zhao-Wu   

  1. School of Material Science and Engineering, Nanchang Hangkong University, Nanchang 330063, P. R. China; State Key Laboratory for Physical Chemistry of Solid Surfaces, College of Chemistry and Chemical Engineering, Xiamen University, Xiamen 361005, Fujian Province, P. R. China
  • Received:2007-11-21 Revised:2008-03-25 Published:2008-07-04
  • Contact: JIANG Li-Min E-mail:jiang_lm9@126.com

Abstract: Micromachining of magnesium alloy by confined etchant layer technique (CELT) was investigated. The variation of hydrogen ion concentration on the electrode surface during the electrochemical process was explored for some thermodynamically available“etchant-scavenger”systems, and their corrosion rate to magnesium alloy was measured. An effective electrochemistry“etching-scavenging”system was selected. Using NaNO2 as precursor for electrochemically generating etchant HNO3, NaOH as scavenger, and small amount of Na2SiO3 as inhibitor, 3-D microstructure lattice on a mold was replicated onto the magnesium alloy surface. The microstructures processed were approximately the negative copy of the ones on the mold. Sub-micrometer scale resolution was reached. The result suggested that CELT could be applied to machine the 3-D microstructure on magnesium alloy surface, which had potential to be used for the fabrication of micro electromechanical systems (MEMS).

Key words: Confined etchant layer technique, Magnesium, 3-D micromachining, Electrochemistry

MSC2000: 

  • O646