Fabrication and Li-Related Impurity of ZnO Ceramic Target
TANG Li-Dan; GU You-Song; ZHANG Yue; LIU Bang-Wu; YANG Ya; QIN Zi
Department of Materials Physics, University of Science and Technology Beijing, Beijing 100083, P. R. China; State Key Laboratory for Advance Metals and Materials, University of Science and Technology Beijing, Beijing 100083, P. R. China