Abstract:

TiO2 thin films were patterned froman aqueous solution containing Ti(SO4)2 by chemical bath deposition and electrochemical deposition methods. Two titanium precursors were prepared, a titanium sulfate solution (pH=1.0) and a peroxotitanium sulfate solution (pH=1.6), and these solutions were stabilized by sulfuric acid and hydrogen peroxide, respectively. Pre-patterned self-assembled monolayers (SAMs) were micro-contact printed on silicon substrates and were then immersed in the chemical bath for deposition to obtain the ordered TiO2 patterns. The inorganic ligands affect the solution stability and the crystallinity of the TiO2 films. The aqueous acidity affected the quality of the patterned films. A peroxotitanium sulfate solution was also used for patterning on the conductive glass of indium tin oxide by electrodeposition. The photoresist was ready for deposition after spin-coating, exposure, and development. Finally, clear patterns with a height of 200 nmwere fabricated by controlling the cathode potential.

Key words: TiO2, Titaniumsulfate, Peroxotitaniumsulfate, Patterning, Chemical bath deposition, Eletrodeposition