Acta Phys. -Chim. Sin. ›› 1995, Vol. 11 ›› Issue (09): 791-795.doi: 10.3866/PKU.WHXB19950906

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Adsorption and Desorption of Oxygen on the Surface of Polycrystalline ZnO Films Deposited by r.f.Sputtering

Zhang Da-Heng   

  1. Department of Physics,Shandong University,Jinan 250100
  • Received:1994-09-03 Revised:1994-12-29 Published:1995-09-15
  • Contact: Zhang Da-Heng

Abstract:

Hexagonal ZnO films with the preferred growth orientation of c axis parallel to the substrate have been deposited by r.f. sputtering. An electrical field induced oxygen adsorption was observed on these films. Oxygen adsorption produced by illumination of a UV light or/and reaction with Ar plasma increased the conductivity of the films by 6-7 orders of magnitude and an accumulation layer displayed on the surface of the films.

Key words: ZnO, Adsorption, Desorption, Photodesorption, Photoresponse