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ISSN 1000-6818CN 11-1892/O6CODEN WHXUEU
Acta Phys Chim Sin >> 2011,Vol.27>> Issue(12)>> 2953-2959     doi: 10.3866/PKU.WHXB20112953         中文摘要
PHYSICAL CHEMISTRY OF MATERIALS
Direct Graphene Growth by Depositing Carbon Atoms on Si Substrate Covered by SiC Buffer Layers
TANG Jun1,2, KANG Chao-Yang1, LI Li-Min1, XU Peng-Shou1
1. National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, P. R. China;
2. Hefei IRICO Epilight Technology Co., Ltd., Hefei 230011, P. R. China
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Graphene is a newly discovered material with many functions. The preparation of graphene on suitable substrates is a challenge in the material preparation field. In this paper, graphene thin films were grown on Si substrates covered with SiC buffer layers (SiC/Si) by the direct deposition of carbon atoms using molecular beam epitaxy (MBE) equipment. The structural properties of the samples produced at different substrate temperatures (800, 900, 1000, 1100 ° C) were investigated by reflection high energy electron diffraction (RHEED), Raman spectroscopy and near-edge X-ray absorption fine structure (NEXAFS). The results indicate that the thin films grown at all temperatures exhibit the characteristics of graphene with a turbostratic stacking structure. As the substrate temperature increases the crystalline quality of the graphene improves. However, a very high temperature decreases the quality of graphene. The best graphene films were obtained at a substrate temperature of 1000 ° C. This is due to the low substrate temperature resulting in a too low carbon atom activity for the formation of an ordered six-member ring of C-sp2. When the substrate temperature was too high the silicon atoms in the substrate became so active that silicon atoms diffused to the surface of the sample through SiC buffer defects and they bonded to the depositing carbon atoms, which resulted in a lower crystallization quality of the carbon layers.

Keywords: Graphene   Molecular beam epitaxy   Si substrate   SiC   Synchrotron radiation  
Received: 2011-07-13 Accepted: 2011-10-12 Publication Date (Web): 2011-10-18
Corresponding Authors: XU Peng-Shou Email: psxu@ustc.edu.cn

Fund: The project was supported by the National Natural Science Foundation of China (50872128).

Cite this article: TANG Jun, KANG Chao-Yang, LI Li-Min, XU Peng-Shou. Direct Graphene Growth by Depositing Carbon Atoms on Si Substrate Covered by SiC Buffer Layers[J]. Acta Phys. -Chim. Sin., 2011,27 (12): 2953-2959.    doi: 10.3866/PKU.WHXB20112953
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69. RAN Ke, CHEN Qing, ZUO Jian-Min.Fabrication and Structure Characterization of Quasi-2-Dimensional Amorphous Carbon Structures[J]. Acta Phys. -Chim. Sin., 2012,28(07): 1551-1555
70. ZHANG Xiao, YANG Rong, WANG Chen, HENG Cheng-Lin.Cell Biocompatibility of Functionalized Graphene Oxide[J]. Acta Phys. -Chim. Sin., 2012,28(06): 1520-1524
71. LIU Bo, SUN Hong-Juan, PENG Tong-Jiang.Factor Group Analysis of Molecular Vibrational Modes of Graphene and Density Functional Calculations[J]. Acta Phys. -Chim. Sin., 2012,28(04): 799-804
72. JIN Yu, CHEN Hong-Yuan, CHEN Ming-Hai, LIU Ning, LI Qing-Wen.Carbon Nanotube/Polyaniline/Graphene Composite Paper and Its Electrochemical Capacitance Behaviors[J]. Acta Phys. -Chim. Sin., 2012,28(03): 609-614
73. XIE Peng-Yang, ZHUANG Gui-Lin, LÜ Yong-An, WANG Jian-Guo, LI Xiao-Nian.Enhanced Bonding between Noble Metal Adatoms and Graphene with Point Defects[J]. Acta Phys. -Chim. Sin., 2012,28(02): 331-337
74. XU Ke, SHEN Lai-Fa, MI Chang-Huan, ZHANG Xiao-Gang.Synthesis and Electrochemical Performance of Graphene Modified LiFePO4 Cathode Materials[J]. Acta Phys. -Chim. Sin., 2012,28(01): 105-110
75. ZHANG Xiao-Yan, SUN Ming-Xuan, SUN Yu-Jun, LI Jing, SONG Peng, SUN Tong, CUI Xiao-Li.Photoelectrochemical Properties of Graphene Oxide Thin Film Electrodes[J]. Acta Phys. -Chim. Sin., 2011,27(12): 2831-2835
76. YANG Xiao-Wei, HE Yu-Shi, LIAO Xiao-Zhen, MA Zi-Feng.Improved Graphene Film by Reducing Restacking for Lithium Ion Battery Applications[J]. Acta Phys. -Chim. Sin., 2011,27(11): 2583-2586
77. DU Xiao-Qing, LI Hui-Qin, ZHU Qi-Rong, ZOU Zhi-Qiang, LIANG Qi.Growth and Nanotribological Properties of C60 Multilayer Films on Si(111)-7×7 Surface[J]. Acta Phys. -Chim. Sin., 2011,27(10): 2457-2461
78. LU Xiang-Jun, DOU Hui, YANG Su-Dong, HAO Liang, ZHANG Fang, ZHANG Xiao-Gang.Fabrication and Electrochemical Capacitive Behavior of Freestanding Graphene/Polyaniline Nanofibre Film[J]. Acta Phys. -Chim. Sin., 2011,27(10): 2333-2339
79. YUAN Wen-Hui, LI Bao-Qing, LI Li.Superior Graphene for Hydrogen Adsorption Prepared by the Improved Liquid Oxidation-Reduction Method[J]. Acta Phys. -Chim. Sin., 2011,27(09): 2244-2250
80. MIN Shi-Xiong, Lü Gong-Xuan.Preparation of CdS/Graphene Composites and Photocatalytic Hydrogen Generation from Water under Visible Light Irradiation[J]. Acta Phys. -Chim. Sin., 2011,27(09): 2178-2184
81. ZHANG Li-Zhi, GAO Jian, ZHAO Dai-Qing, JIANG Li-Qiao, YANG Jiu-Zhong, WANG Zhan-Dong, JIN Han-Feng.Migration Pathways of Oxygen and the Formation of Oxygenated Intermediates in Oxygenated Fuel Combustion[J]. Acta Phys. -Chim. Sin., 2011,27(08): 1809-1815
82. YING Hong, WANG Zhi-Yong, GUO Zheng-Duo, SHI Zu-Jin, YANG Shang-Feng.Reduced Graphene Oxide-Modified Bi2WO6 as an Improved Photocatalyst under Visible Light[J]. Acta Phys. -Chim. Sin., 2011,27(06): 1482-1486
83. ZHANG Yi, CHEN Biao, YANG Zu-Pei, ZHANG Zhi-Jun.Controlled Synthesis and Characterization of the Structure and Property of Fe3O4 Nanoparticle-Graphene Oxide Composites[J]. Acta Phys. -Chim. Sin., 2011,27(05): 1261-1266
84. SUN Da-Li, PENG Sheng-Lin, OUYANG Jun, OUYANG Fang-Ping.Electronic Transport Properties of Graphene Nanoribbons with Nanoholes[J]. Acta Phys. -Chim. Sin., 2011,27(05): 1103-1107
85. LI Yun-Xia, WEI Zi-Dong, ZHAO Qiao-Ling, DING Wei, ZHANG Qian, CHEN Si-Guo.Preparation of Pt/Graphene Catalyst and Its Catalytic Performance for Oxygen Reduction[J]. Acta Phys. -Chim. Sin., 2011,27(04): 858-862
86. YANG Yong-Hui, SUN Hong-Juan, PENG Tong-Jiang, HUANG Qiao.Synthesis and Structural Characterization of Graphene-Based Membranes[J]. Acta Phys. -Chim. Sin., 2011,27(03): 736-742
87. DAI Xian-Qi, LI Yan-Hui, ZHAO Jian-Hua, TANG Ya-Nan.Effects of Vacancy and Boron Doping on Si Adsorption on Graphene[J]. Acta Phys. -Chim. Sin., 2011,27(02): 369-373
88. WU Xiao-Qin, ZONG Rui-Long, MU Hao-Jie, ZHU Yong-Fa.Cataluminescence Performance on Catalysts of Graphene Supported Platinum[J]. Acta Phys. -Chim. Sin., 2010,26(11): 3002-3008
89. HU Yao-Juan, JIN Juan, ZHANG Hui, WU Ping, CAI Chen-Xin.Graphene: Synthesis, Functionalization and Applications in Chemistry[J]. Acta Phys. -Chim. Sin., 2010,26(08): 2073-2086
90. WEN Zhu-Liang, YANG Su-Dong, SONG Qi-Jun, HAO Liang, ZHANG Xiao-Gang.High Activity of Pd/Graphene Catalysts for Ethanol Electrocatalytic Oxidation[J]. Acta Phys. -Chim. Sin., 2010,26(06): 1570-1574
91. GAN Lin, LIU Song, LI Dan-Na, GU Hang, CAO Yang, SHEN Qian, WANG Zhen-Xing, WANG Qing, GUO Xue-Feng.Facile Fabrication of the Crossed Nanotube-Graphene Junctions[J]. Acta Phys. -Chim. Sin., 2010,26(04): 1151-1156
92. GUO Xiang-Yun, JIN Guo-Qiang, WANG Ying-Yong.Preparations and Catalytic Applications of High Surface Area Silicon Carbide[J]. Acta Phys. -Chim. Sin., 2010,26(04): 1143-1150
93. GAO Jian, ZHAO Dai-Qing, WANG Xiao-Han, JIANG Li-Qiao, YANG Hao-Lin, YUAN Tao, YANG Jiu-Zhong.Comparative Study of Dimethyl Ether and Ethanol Premixed Laminar Flames at Low Pressure[J]. Acta Phys. -Chim. Sin., 2010,26(01): 23-28
94. TANG Jun, LIU Zhong-Liang, KANG Chao-Yang, YAN Wen-Sheng, XU Peng-Shou, PAN Hai-Bin, WEI Shi-Qiang, GAO Yu-Qiang, XU Xian-Gang.Annealing Time Dependence of Morphology and Structure of Epitaxial Graphene on 6H-SiC(0001) Surface[J]. Acta Phys. -Chim. Sin., 2010,26(01): 253-258
95. YANG Guang-Tao; ZHANG Guo-Bin; LIU Fu-Yi; DU Qi; SHAN Xiao-Bin; HAN Ju-Guang; SHENG Liu-Si.Synchrotron Radiation Vacuum Ultraviolet Photoionization and Photodissociation of Diethylzinc[J]. Acta Phys. -Chim. Sin., 2008,24(10): 1767-1772
96. LIU Zhong-Liang; REN Peng; LIU Jin-Feng; TANG Jun; XU Peng-Shou.Effect of Predeposited Ge on the Growth of SiC Films on Si(111) by SSMBE[J]. Acta Phys. -Chim. Sin., 2008,24(07): 1160-1164
97. LIU Jin-Feng; LIU Zhong-Liang; REN Peng; XU Peng-Shou; CHEN Xiu-Fang; XU Xian-Gang.Fabrication and Luminescent Properties of 6H-SiC/3C-SiC/6H-SiC Quantum Well Structure[J]. Acta Phys. -Chim. Sin., 2008,24(04): 571-575
98. FENG Wang-Sheng; FANG Yan; XU Ji-Xiang; FANG Chun-Hui; JIA Quan-Jie; WANG Huan-Hua; JIANG Xiao-Ming.Application of Gaussian Multi-Peak Fitting to Radial Distribution Function[J]. Acta Phys. -Chim. Sin., 2008,24(03): 497-501
99. ZHAN Ying-Ying; CAI Guo-Hui; ZHENG Yong; SHEN Xiao-Nv; ZHENG Ying; WEI Ke-Mei.Synthesis of High Surface Area Silicon Carbide and Its Application in CO Oxidation Reaction[J]. Acta Phys. -Chim. Sin., 2008,24(01): 171-175
100. WANG Li-Wu; LI Zong-Mu; ZHANG Wen-Hua; XU Fa-Qiang; Wang Jie; YAN Wen-Sheng.Electrochemical Epitaxy and XMCD Study of Co-Ni Alloy Film[J]. Acta Phys. -Chim. Sin., 2007,23(08): 1163-1167
101. CHEN Jian; HUANG Zheng-Ren; DONG Shao-Ming; JIANG Dong-Liang.Adsorption of Polyethylene Glycol on Silicon Carbide Measured by Thermal Gravimetric and Differential Thermal Analysis[J]. Acta Phys. -Chim. Sin., 2007,23(06): 926-928
102. Li You-Ji;Cao Feng;Tian Hong-Xian;Li Xiao-Dong;Yu Yu-Xi.The Preparation and Properties of High Temperature Resistant SiC(Al) Fibers[J]. Acta Phys. -Chim. Sin., 2003,19(11): 1039-1043
103. Wu Guo-Hua, Sheng Liu-Si, Zhang Yun-Wu, Gao Hui, Chen Zu-Yao.Photoionization and Photodissociative lonization of Azoxybenzene(C12H10N2O) by Vacuum Ultraviolet Synchrotron Radiation (SR)[J]. Acta Phys. -Chim. Sin., 2000,16(10): 948-951
104. Liu Fu-Yi, Li Cheng-Xiang, Gao Hui, Sheng Liu-Si, Zhang Yun-Wu.Photoionization of Epichlorohydrin by Synchrotron Radiation[J]. Acta Phys. -Chim. Sin., 2000,16(08): 758-763
105. Zhou Wei-Dong, Sheng Liu-Si, Wu Guo-Hua, Gao Hui, Qi-Fei, Zhang Yun-Wu.Experimental and Theoretical Study of Photoionization and Photodissociation of Bromoethane[J]. Acta Phys. -Chim. Sin., 1999,15(10): 948-951
106. Wu Guo-Hua, Sheng Liu-Si, Gao Hui, Zhang Yun-Wu.Studies on p-aminoazobenzene(C12H11N3)Using Photoionization Mass Spectrum with Synchrotron Radiation(SR)[J]. Acta Phys. -Chim. Sin., 1999,15(09): 860-864
107. Zou Peng, Wu Guo-Sheng, Chen Wen-Wu, Yang Da-Lin, Sheng Liu-Si, Wu Guo-Hua, Ye Wei-Quan, Zhang Yun-Wu.A Study of 1,4-dioxane Photoionization and Dissociation[J]. Acta Phys. -Chim. Sin., 1998,14(01): 21-26
108. Sheng Liu-Si,Qi Fei,Gao Hui,Zhang Yun-Wu,Yu Shu-Qin.Vacuum-ultraviolet Photoion Spectrum of Vinyl Chloride Near Ionization Threshlod[J]. Acta Phys. -Chim. Sin., 1997,13(07): 647-649
109. Dai Chang-Hong,Liu Su-Lan,Zhang Xian-Peng.Microwave Synthesis of SiC Nanometer Whiskers[J]. Acta Phys. -Chim. Sin., 1997,13(04): 380-384
110. Li Yue,Wang Xiu-Yan,Zhang Xiao-Guang,Li Lian-Bin,Lou Nan-Quan,Sheng Liu-Si,Zhang.The Photoionization Investigations of van der Waals Cluster ArHCl[J]. Acta Phys. -Chim. Sin., 1997,13(04): 322-327
111. Wu Guo-Hua,Sheng Liu-Si,Gao Hui,Zhang Yun-Wu.Photoionization Studies of m-nitroaniline Using Synchrotron Radiation[J]. Acta Phys. -Chim. Sin., 1997,13(04): 317-321
112. Wu Guo-Sheng,Gao Yi-Qin,Chen Wen-Wu,Yang Da-Lin,Sheng Liu-Si,Wu Guo-Hua,Ye Wei-Q.Photoionization and Dissociation of 4H-furan by Synchrontron Radiation[J]. Acta Phys. -Chim. Sin., 1997,13(02): 188-192
113. Chen Wen-Wu,Sheng Liu-Si,Ding Chuan-Fan,Qi Fei,Zhang Yun-Wu,Kong Fan-Ao.The Measurement of Adiabatic Lonization Potential of Si(CH3)3Cl and Chemical Bond Energies of Si(CH3)3Cl+[J]. Acta Phys. -Chim. Sin., 1996,12(06): 560-563
114. Sheng Liu-Si,Qi Fei,Gao Hui,Luo Zhi-Yong,Zhang Yun-Wu.Studies of C4H5Cl+ by Interamolecular Ion-Molecule Reactions within Cluster (C2H3Cl)2[J]. Acta Phys. -Chim. Sin., 1995,11(11): 1004-1007
115. Sheng Liu-Si, QI Fei, Zhang Yun-Wu, Chen Wen-Wu, Wang Zhao-Hui, Ding Chuan-Fan, Kong Fan-Ao.The Measurement of the Ionization Potential and the Bond Energy Si(CH3)2Cl2[J]. Acta Phys. -Chim. Sin., 1995,11(10): 870-872
116. LI Guang-Yong, WU Xiao-Han, HE Wei-Na, FANG Jian-Hui, ZHANG Xue-Tong.Controlled Assembly of the Graphene-based Aerogel[J]. Acta Phys. -Chim. Sin., 0,(): 0-0
117. WANG Cheng-Xian, YU Fei, MA Jie.Applications of Graphene-based Hybrid Material as Electrodes in Microbial Fuel Cells[J]. Acta Phys. -Chim. Sin., 0,(): 0-0
118. ZHU Jie-Jun, SUN Hai-Bin, WU Yao-Zheng, WAN Jian-Guo, WANG Guang-Hou.Graphene: Synthesis, Characterization and Application in Transparent Conductive Films[J]. Acta Phys. -Chim. Sin., 0,(): 0-0
119. WANG Yun-Jing, LIU Ying-Qiu, GAO Xiu-Xiu, ZHAN Yan-Shan, PAN Li-Yang, ZHANG Wen-Kai, FANG Xiao-Min.Surface Defects Passivation of Graphene Quantum Dots by Amino Functionalization and its Photoluminescence Emission Enhancement[J]. Acta Phys. -Chim. Sin., 0,(): 0-0
120. LIANG Jia-Xu, XIAO Zhi-Chang, ZHI Lin-Jie.Graphenal Polymers: 3D Carbon-rich Polymers as Energy Materials with both Electronic and Ionic Transport Path[J]. Acta Phys. -Chim. Sin., 0,(): 0-0
121. XIA Kai-Lun, JIAN Mu-Qiang, ZHANG Ying-Ying.Advances in Flexible Conductors Based on Nanocarbon Materials[J]. Acta Phys. -Chim. Sin., 0,(): 0-0
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