Application of Ultraviolet Treatment in the Synthesis of Pure-silica Zeolite Thin Films with Low Dielectric Constant
YUAN Hao; LI Qing-Hua; SHA Fei; XIE Li-Li; TIAN Zhen; WANG Li-Jun
Acta Phys. -Chim. Sin. . 2007, (08): 1219 -1223 .  DOI: 10.3866/PKU.WHXB20070815