Effect of Substrate Temperature on the Optical Properties of a-Si:H Films by RF-PECVD
LI Shi-Bin; WU Zhi-Ming; ZHU Kui-Peng; JIANG Ya-Dong; LI Wei; LIAO Nai-Man
Acta Phys. -Chim. Sin. . 2007, (08): 1252 -1256 .  DOI: 10.3866/PKU.WHXB20070821