Electrochemical Micromachining on Different Types of GaAs by Confined Etchant Layer Technique
TANG Jing, WANG Wen-Hua, ZHUANG Jin-Liang, CUI Chen
Acta Physico-Chimica Sinica . 2009, (08): 1671 -1677 .  DOI: 10.3866/PKU.WHXB20090810