Design and Fabrication of a Miniature FAIMS Sensor Chip
LI Hua, WANG Xiao-Hao, TANG Fei, ZHANG Liang, YANG Ji, LIN Tao, DING Li
Acta Phys. -Chim. Sin. . 2010, (05): 1355 -1363 .  DOI: 10.3866/PKU.WHXB20100508