XPS Study of the Thickness Nanosize Effect for Ultrathin SiO 2 on Si Substrate
ZHAO Zhi-Juan, LIU Fen, ZHAO Liang-Zhong
Acta Phys. -Chim. Sin. . 2010, (11): 3030 -3034 .  DOI: 10.3866/PKU.WHXB20101111