Diagnosis of Emission Spectra on Chemical Vapor Deposition of TiO 2 System with Atmospheric-Pressure Radio Frequency Plasma
CHANG Da-Lei, LI Xiao-Song, ZHAO Tian-Liang, ZHU Ai-Min
Acta Phys. -Chim. Sin. . 2013, (03): 625 -630 .  DOI: 10.3866/PKU.WHXB201212271