In Situ Growth and Characterization of TiN/Hf xZr 1-xO 2/TiN Ferroelectric Capacitors
Yuhao Yin, Yang Shen, Hu Wang, Xiao Chen, Lin Shao, Wenyu Hua, Juan Wang, Yi Cui
Acta Phys. -Chim. Sin. . 2022, (5): 2006016 -0 .  DOI: 10.3866/PKU.WHXB202006016