| 2010, Vol. 26(10): 2625-2632 DOI: 10.3866/PKU.WHXB20101002 | ||
| Electrodeposition of Copper in a Citrate Bath and Its Application to a Micro-Electro-Mechanical System | ||
| WU Wei-Gang1, YANG Fang-Zu1, LUO Ming-Hui2, TIAN Zhong-Qun1, ZHOU Shao-Min1 | ||
| 1. College of Chemistry and Chemical Engineering, State Key Laboratory of Physical Chemistry of Solid Surfaces, Xiamen University, Xiamen 361005, Fujian Province, P. R. China; 2. School of Physics and Mechanical & Electrical Engineering, Xiamen University, Xiamen 361005, Fujian Province, P. R. China |
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| Received 2010-03-20 Revised 2010-07-22 | ||
| Supporting info | ||
