On the Etching Revolution of Electrochemical Micro-(Nano-) Fabrication Technique—Its Limit and Solution
Zu Yan-Bing,Xie Lei,Luo Jin,Mao Bing-Wei,Tian Zhao-Wu
Acta Phys. -Chim. Sin. . 1997, (11): 965 -968 .  DOI: 10.3866/PKU.WHXB19971102