Concentration Protile of Etchant Measured by Microelectrode Technique in the Process of Chemical Micromachining
TANG Jing;MA Xin-Zhou;HE Hui-Zhong;ZHANG Li;LIN Mi-Xuan;QU Dong-Sheng2 DING Qing-Yong;SUN Li-Ning
Acta Phys. -Chim. Sin. . 2006, (04): 507 -512 .  DOI: 10.3866/PKU.WHXB20060423