The Role of Sulfite in the Wetting Etching of Silicon and Silica
Ouyang Jian-Hua;Wu Nian-Zu;Zhao Xin-Sheng
Acta Phys. -Chim. Sin. . 2004, (06): 612 -615 .  DOI: 10.3866/PKU.WHXB20040612