Effects of Substrate-Target Distance and Si Co-Doping on the Properties of Al-Doped ZnO Films Deposited by Magnetron Sputtering
XU Hao, LU Fang, FU Zheng-Wen
Acta Phys. -Chim. Sin. . 2011, (05): 1232 -1238 .  DOI: 10.3866/PKU.WHXB20110422