qPlus型非接触原子力显微技术进展及前沿应用

刘梦溪,李世超,查泽奇,裘晓辉

Research Progress and Applications of qPlus Noncontact Atomic Force Microscopy

Meng-Xi LIU,Shi-Chao LI,Ze-Qi ZHA,Xiao-Hui QIU

图1 非接触原子力显微镜的工作原理6

Fig 1 Working principle of non-contact atomic force microscopy (NC-AFM)6 (A) block diagram of the NC-AFM feedback loop for constant amplitude control and frequency-shift measurement; (B) qPlus sensor; (C) total interaction force between tip and sample