四维扫描透射电子显微镜技术：从材料微观结构到物性分析

冯启龙, 朱翀之, 盛冠, 孙土来, 李永合, 朱艺涵

Four-Dimensional Scanning Transmission Electron Microscopy: From Material Microstructures to Physicochemical Properties

Qilong Feng, Chongzhi Zhu, Guan Sheng, Tulai Sun, Yonghe Li, Yihan Zhu

图2 利用4D-STEM技术进行虚拟探测器成像20, 23, 30

Fig 2 Virtual detector imaging using 4D-STEM technology20, 23, 30. (a–d) Four detector configurations. (a) Bright-field detector. (b) Annular bright field detector. (c) Four-division detector. (d) Low angle annular dark field detector. (e) Reconstructed MoS2 brightfield image. (f) Reconstructed MoS2 annular bright field image. (g) Reconstructed MoS2 differential phase contrast image. (h) Reconstructed MoS2 low-angle annular dark field image. (i) Demonstration of different masked regions for virtual detectors. (j) DyScO3 atomic model schematic. (k) HAADF image generated by hardware high angle annular dark field detector. (l) Reconstructed DyScO3 brightfield image. (m) Reconstructed DyScO3 annular dark field image. (n) Reconstructed DyScO3 annular bright field image. (o) Schematic diagram of 4D-STEM data acquisition (left), images reconstructed from 4D-STEM data, including HAADF image, integrated phase contrast image, differential phase contrast image, and center of mass image. (a–h) Adapted from American Chemical Society publisher. (i–n) Adapted from Springer Nature publisher. (o) Adapted from Springer Nature publisher.