Abstract: Low energy (1.5 KeV) ISS is a surface sensitive technique for identification of element on the top layer of material. The energy losses of primary particle during the collision in low energy ISS technique are assumed to be completely kinetic, i.e. the electronic interaction energy transfer is generally small and will be neglected. In this paper, however, the electronic effect is measurable for certain supported oxide or halide catalysts by improved experimental technique. The shift of scatter- ing He~+ peak due to electronic effect is remarkable and different for Mo in MoO_3/TiO_2, MoO_3/γ-Al_2O_3, MoO_3/SiO_2 and Cu in CuO/γ-Al-2O_3, CuCl/γ-Al_2O_3. The corresponding “mass increment” was calculated by the binary collision approach. We find out that the “mass increment” may characterize the interaction between active component and carrier in supported catalysts. Thus, low energy ISS is not only a good tool for surface elemental analysis but also an effective probe for chemical information of surface species.