物理化学学报 >> 1996, Vol. 12 >> Issue (09): 769-772.doi: 10.3866/PKU.WHXB19960901

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钇系超导体有机硅保护膜的磁控等离子体聚合

王锐,金心宇,陈抗生,梁素珍   

  1. 浙江大学信息与电子工程学系，杭州 310027
  • 收稿日期:1996-05-22 修回日期:1996-06-21 发布日期:1996-09-15
  • 通讯作者:

Study of Organic Silicon Protection Film by Magnetic-Controlling Plasma Polymerization on the Y-Ba-Cu-O Superconductor

Wang Rui,Jin Xin-Yu,Cheng Kang-Sheng,Liang Su-Zhen   

  1. Department of Information and Electronics,Zhejiang University,Hangzhou 310027
  • Received:1996-05-22 Revised:1996-06-21 Published:1996-09-15
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关键词: 磁控等离子体聚合, 钇钡铜氧化物超导体, 有机硅保护膜

Abstract:

A new method of deposition of organic silicon film by magnetic-controlling plasma polymerization was used to protect Y-Ba-Cu-O superconductor from corrosion. The deposition rate of plasma polymer film with magnetic-controlling is 20 times over that without magnetic-controlling. The relation between the deposition rate of film and the process factors of magnetic-controlling plasma were studied. The Y-Ba-Cu-O superconductor covered with organic silicon film was formed by magnetic-controlling plasma polymerization had been protected from corrosion in water over 48 hours.

Key words: Magnetic-controlling plasma polymerization, Y-Ba-Cu-O superconductor, Organic silicon protective film