物理化学学报 >> 2010, Vol. 26 >> Issue (02): 502-506.doi: 10.3866/PKU.WHXB20100139

材料物理化学 上一篇    下一篇

水溶液法制备图案化TiO2薄膜

梁山, 薛群基, 崔玉红, 赵占芬   

  1. 天津科技大学理学院, 天津 300457; 中国科学院兰州化学物理研究所, 固体润滑国家重点实验室, 兰州 730000
  • 收稿日期:2009-08-27 修回日期:2009-10-26 发布日期:2010-01-26
  • 通讯作者: 梁山 E-mail:liangshan@tust.edu.cn

Patterning of TiO2 Thin Films Prepared from Aqueous Solutions

LIANG Shan, XUE Qun-Ji, CUI Yu-Hong, ZHAO Zhan-Fen   

  1. College of Science, Tianjin University of Science and Technology, Tianjin 300457, P. R. China; State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, P. R. China
  • Received:2009-08-27 Revised:2009-10-26 Published:2010-01-26
  • Contact: LIANG Shan E-mail:liangshan@tust.edu.cn

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摘要：

从硫酸钛Ti(SO4)2的水溶液出发, 采用化学浴沉积和电沉积法来制备图案化TiO2薄膜. 通过硫酸和双氧水来稳定Ti4+, 配制了pH=1.0的硫酸钛溶液和pH=1.6的过氧硫酸钛溶液. 结合微接触印刷术在硅基底上制得自组装膜预图案, 再化学浴沉积TiO2即可得规则图纹. 无机配体对钛溶液的稳定性和TiO2的晶型均有影响, 溶液的酸度关系到所得图案的质量. 过氧硫酸钛溶液同样适用于电沉积, 在导电玻璃基底上旋涂光刻胶后选择性曝光、显影, 通过控制阴极电位可获得高差达200 nm的清晰图案.

关键词: TiO2, 硫酸钛, 过氧硫酸钛, 图案化, 化学浴沉积, 电沉积

Abstract:

TiO2 thin films were patterned froman aqueous solution containing Ti(SO4)2 by chemical bath deposition and electrochemical deposition methods. Two titanium precursors were prepared, a titanium sulfate solution (pH=1.0) and a peroxotitanium sulfate solution (pH=1.6), and these solutions were stabilized by sulfuric acid and hydrogen peroxide, respectively. Pre-patterned self-assembled monolayers (SAMs) were micro-contact printed on silicon substrates and were then immersed in the chemical bath for deposition to obtain the ordered TiO2 patterns. The inorganic ligands affect the solution stability and the crystallinity of the TiO2 films. The aqueous acidity affected the quality of the patterned films. A peroxotitanium sulfate solution was also used for patterning on the conductive glass of indium tin oxide by electrodeposition. The photoresist was ready for deposition after spin-coating, exposure, and development. Finally, clear patterns with a height of 200 nmwere fabricated by controlling the cathode potential.

Key words: TiO2, Titaniumsulfate, Peroxotitaniumsulfate, Patterning, Chemical bath deposition, Eletrodeposition