物理化学学报 >> 2010, Vol. 26 >> Issue (04): 1135-1142.doi: 10.3866/PKU.WHXB20100424

材料物理化学 上一篇    下一篇

基于静态呼吸图技术的图案化方法

李磊, 钟雅文, 陈财康, 李剑   

  1. 厦门大学材料学院, 福建 厦门 361005
  • 收稿日期:2009-11-15 修回日期:2010-01-04 发布日期:2010-04-02
  • 通讯作者: 李磊 E-mail:lilei@xmu.edu.cn

A Novel Path to Patterning Based on the Static Breath Figure Technique

LI Lei, ZHONG Ya-Wen, CHEN Cai-Kang, LI Jian   

  1. College of Materials, Xiamen University, Xiamen 361005, Fujian Province, P. R. China
  • Received:2009-11-15 Revised:2010-01-04 Published:2010-04-02
  • Contact: LI Lei E-mail:lilei@xmu.edu.cn

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摘要：

对呼吸图技术制备二维有序多孔结构的研究进展进行了综合评述, 并重点介绍了本课题组发展的静态呼吸图技术. 利用静态呼吸图法, 可制备高度有序的聚合物、聚合物/无机物微孔膜. 这些有序的结构可以直接应用于光掩膜. 进一步, 多孔聚合物膜可以被紫外光交联和改性. 表面改性的多孔聚合物膜可以用于细胞支架. 而交联的聚合物/无机物前驱体微孔膜可以用来制备无机纳米材料阵列. 结果表明, 静态呼吸图技术是一种简单、高效的对聚合物、聚合物/无机物薄膜进行图案化的通用方法,并展示了图案化薄膜广阔的功能化前景.

关键词: 静态呼吸图, 嵌段聚合物, 图案化

Abstract:

The breath figure technique is one of the most promising strategies for the fabrication of large-sized patterns containing an ordered two-dimensional array of holes. In this review, particular emphasis is placed on the static breath figure technique, which is a robust methodology suitable for various polymers including linear polystyrene (PS), amphiphilic diblock copolymers and polymer/inorganic precursor hybrid films. The resultant highly ordered microporous polymer films can be used as a mask for lithography. Moreover, the microporous polymer films can be surface modified and cross-linked by UV irradiation. The surface modified films can potentially be applied as a cell scaffold and the cross-linked polymer/hybrid films can be used as templates for the growth of nanomaterial arrays.

Key words: Static breath figure, Block copolymer, Patterning