衬底温度对用RF-PECVD法制备的非晶硅薄膜光学性能影响
李世彬;吴志明;朱魁鹏;蒋亚东;李伟;廖乃镘
Effect of Substrate Temperature on the Optical Properties of a-Si:H Films by RF-PECVD
LI Shi-Bin; WU Zhi-Ming; ZHU Kui-Peng; JIANG Ya-Dong; LI Wei; LIAO Nai-Man
物理化学学报
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2007, (08): 1252
-1256
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DOI: 10.3866/PKU.WHXB20070821
